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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">3. 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">4. 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style=\"font-size: 20px;font-weight: bold;margin-top: 18px;margin-bottom: 10px\">\u4e09\u3001\u5bcc\u6cf0\u79d1\u6280\u5728MEMS\u539f\u5b50\u6c14\u5ba4\u914d\u5957\u4e2d\u7684\u6838\u5fc3\u4f18\u52bf<\/h2>\n<p>\u3000\u3000\u57fa\u4e8e\u4e0a\u8ff0\u5ba2\u6237\u771f\u5b9e\u4f53\u9a8c\uff0c\u6df1\u5733\u5e02\u5bcc\u6cf0\u514b\u5149\u7535\u6709\u9650\u516c\u53f8(\u5bcc\u6cf0\u79d1\u6280)\u5728MEMS\u539f\u5b50\u6c14\u5ba4\u53ca\u76f8\u5173\u914d\u5957\u670d\u52a1\u4e2d\uff0c\u5c55\u73b0\u51fa\u4ee5\u4e0b\u56db\u5927\u6838\u5fc3\u4f18\u52bf\uff1a<\/p>\n<p><strong>\u3000\u30001. \u4e13\u4e1a\u9009\u578b\u4e0e\u7cfb\u7edf\u96c6\u6210\u80fd\u529b<\/strong><br 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\/>\n\u9762\u5bf9\u5ba2\u6237\u975e\u6807\u9700\u6c42\uff0c\u5bcc\u6cf0\u79d1\u6280\u80fd\u591f\u5feb\u901f\u534f\u8c03\u4f9b\u5e94\u5546\u8fdb\u884c<strong>\u4ea7\u54c1\u6539\u578b<\/strong>\uff0c\u5982\u8c03\u6574\u6c14\u5ba4\u5c3a\u5bf8\u3001\u5c01\u88c5\u5f62\u5f0f\u3001\u5149\u5b66\u7a97\u53e3\u6750\u6599\u7b49\u3002\u5728\u9879\u76ee\u5f00\u53d1\u9636\u6bb5\uff0c\u4ed6\u4eec\u63d0\u4f9b<strong>\u6837\u54c1\u6d4b\u8bd5\u652f\u6301<\/strong>\u548c<strong>\u6280\u672f\u54a8\u8be2<\/strong>\uff0c\u5e2e\u52a9\u5ba2\u6237\u7f29\u77ed\u7814\u53d1\u5468\u671f\u3002<\/p>\n<p><strong>\u3000\u30004. \u5168\u6d41\u7a0b\u6280\u672f\u652f\u6301\u4e0e\u552e\u540e\u4fdd\u969c<\/strong><br 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