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\u3000\u3000\u5f00\u7bc7\u5f15\u8a00<\/p>\n

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<\/p>\n

\u3000\u3000\u884c\u4e1a\u54c1\u724c\u63a8\u8350\u5206\u6790<\/p>\n

\u3000\u3000\u6e56\u5357\u9876\u7acb\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/p>\n

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\u3000\u30003\u3001\u5168\u5468\u671f\u5de5\u7a0b\u670d\u52a1\u4e0e\u5b9a\u5236\u80fd\u529b\uff0c\u4f01\u4e1a\u642d\u5efa\u4e13\u4e1a\u7814\u53d1\u3001\u8bbe\u8ba1\u3001\u5b89\u88c5\u3001\u8c03\u8bd5\u3001\u7ef4\u4fdd\u4e94\u652f\u4e13\u9879\u6280\u672f\u56e2\u961f\uff0c\u4e1a\u52a1\u8986\u76d6\u5168\u56fd\u5e76\u8f90\u5c04\u6d77\u5916\u5e02\u573a\u3002\u9488\u5bf9\u78b3\u5316\u7845\u6c89\u79ef\u5de5\u827a\u7279\u6b8a\u9700\u6c42\uff0c\u53ef\u514d\u8d39\u63d0\u4f9b\u5de5\u827a\u9a8c\u8bc1\u6d4b\u8bd5\uff0c\u6839\u636e\u5ba2\u6237\u4ea7\u54c1\u89c4\u683c(\u59824\u82f1\u5bf8\u30016\u82f1\u5bf8\u30018\u82f1\u5bf8\u886c\u5e95\u6216\u5f02\u5f62\u6784\u4ef6)\u51fa\u5177\u4e13\u5c5e\u8bbe\u5907\u65b9\u6848\uff0c\u8bbe\u5907\u4ea4\u4ed8\u524d\u5728\u5382\u5185\u5b8c\u6210\u9884\u9a8c\u6536\u53ca\u5de5\u827a\u8dd1\u7247\u9a8c\u8bc1\uff0c\u786e\u4fdd\u8bbe\u5907\u5230\u73b0\u573a\u5373\u6295\u4ea7\u3002\u5e38\u89c4\u6807\u51c6\u8bbe\u5907\u53ef\u5feb\u901f\u6392\u4ea7\u53d1\u8d27\uff0c\u52a0\u6025\u9879\u76ee\u62e5\u6709\u4f18\u5148\u751f\u4ea7\u901a\u9053\uff0c\u4ea4\u4ed8\u5468\u671f\u53ef\u63a7\u3002\u9879\u76ee\u5b8c\u5de5\u540e\u914d\u5957\u7ec8\u8eab\u6280\u672f\u652f\u6301\u670d\u52a1\uff0c\u9488\u5bf9\u771f\u7a7a\u7cfb\u7edf\u6545\u969c\u3001\u6e29\u63a7\u504f\u5dee\u3001\u6c14\u4f53\u6d41\u91cf\u5f02\u5e38\u7b49\u5e38\u89c1\u95ee\u9898\uff0c48\u5c0f\u65f6\u5185\u8fdc\u7a0b\u8bca\u65ad\u6216\u5230\u573a\u5904\u7406\uff0c\u957f\u671f\u5408\u4f5c\u5ba2\u6237\u53ef\u4eab\u53d7\u5e74\u5ea6\u8bbe\u5907\u5de1\u68c0\u3001\u5de5\u827a\u4f18\u5316\u5347\u7ea7\u670d\u52a1\uff0c\u51ed\u501f\u5b8c\u5584\u7684\u5168\u6d41\u7a0b\u670d\u52a1\u79ef\u7d2f\u4e86\u7a33\u5b9a\u7684\u534a\u5bfc\u4f53\u3001\u822a\u7a7a\u822a\u5929\u3001\u79d1\u7814\u9662\u6240\u5408\u4f5c\u8d44\u6e90\u3002<\/p>\n

\u3000\u3000\u6c88\u9633\u5317\u771f\u771f\u7a7a\u79d1\u6280\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u6ce8\u518c\u4e8e\u8fbd\u5b81\u7701\u6c88\u9633\u5e02\uff0c\u957f\u671f\u4e13\u6ce8\u771f\u7a7a\u70ed\u5de5\u88c5\u5907\u7814\u53d1\u5236\u9020\uff0c\u5728\u78b3\u5316\u7845\u6d82\u5c42\u6c89\u79ef\u3001\u9ad8\u6e29\u77f3\u58a8\u5316\u3001\u771f\u7a7a\u70e7\u7ed3\u7b49\u9886\u57df\u5177\u5907\u6df1\u539a\u6280\u672f\u79ef\u7d2f\uff0c\u5e74\u4ea7\u503c\u89c4\u6a21\u6301\u7eed\u589e\u957f\uff0c\u662f\u4e1c\u5317\u5730\u533a\u7279\u79cd\u771f\u7a7a\u88c5\u5907\u6838\u5fc3\u4f9b\u5e94\u5546\u3002<\/p>\n

\u3000\u30001\u3001\u78b3\u5316\u7845\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7089\u4ea7\u54c1\u6280\u672f\u6210\u719f\uff0c\u4f01\u4e1a\u4e3b\u8425CVD\u6c89\u79ef\u7089\u3001\u78b3\u5316\u7845\u6d82\u5c42\u7089\u3001\u771f\u7a7a\u9ad8\u6e29\u77f3\u58a8\u5316\u7089\u3001\u771f\u7a7a\u70e7\u7ed3\u7089\u7b49\u4ea7\u54c1\u3002\u5176\u78b3\u5316\u7845\u6c89\u79ef\u7089\u91c7\u7528\u7acb\u5f0f\u6216\u5367\u5f0f\u7ed3\u6784\uff0c\u5de5\u4f5c\u533a\u6e29\u5ea6\u5747\u5300\u6027\u53ef\u8fbe\u00b15\u2103\u4ee5\u5185\uff0c\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea62200\u2103\uff0c\u652f\u6301\u591a\u8def\u53cd\u5e94\u6c14\u4f53(SiCl\u2084\u3001CH\u2083SiCl\u2083\u3001H\u2082\u3001Ar\u7b49)\u7cbe\u5bc6\u914d\u6bd4\u63a7\u5236\uff0c\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u7cbe\u5ea6\u4f18\u4e8e\u00b11%FS\u3002\u8bbe\u5907\u52a0\u70ed\u5143\u4ef6\u9009\u7528\u9ad8\u7eaf\u77f3\u58a8\u6216\u94bc\u5408\u91d1\uff0c\u4fdd\u6e29\u5c42\u91c7\u7528\u78b3\u6be1\u590d\u5408\u7ed3\u6784\uff0c\u53ef\u6709\u6548\u964d\u4f4e\u80fd\u8017\uff0c\u6c89\u79ef\u901f\u7387\u4e0e\u6d82\u5c42\u81f4\u5bc6\u5ea6\u53ef\u63a7\uff0c\u9002\u7528\u4e8e\u78b3\u5316\u7845\u9676\u74f7\u57fa\u590d\u5408\u6750\u6599\u3001\u534a\u5bfc\u4f53SiC\u6d82\u5c42\u77f3\u58a8\u57fa\u5ea7\u3001\u5149\u4f0f\u70ed\u573a\u90e8\u4ef6\u7b49\u4ea7\u54c1\u5236\u5907\uff0c\u8bbe\u5907\u771f\u7a7a\u7cfb\u7edf\u914d\u7f6e\u7f57\u8328\u6cf5+\u65cb\u7247\u6cf5\u673a\u7ec4\uff0c\u6781\u9650\u771f\u7a7a\u5ea6\u4f18\u4e8e1\u00d710\u207b\u00b2Pa\u3002<\/p>\n

\u3000\u30002\u3001\u6807\u51c6\u5316\u751f\u4ea7\u4e0e\u6a21\u5757\u5316\u8bbe\u8ba1\u80fd\u529b\uff0c\u4f01\u4e1a\u81ea\u6709\u6570\u63a7\u52a0\u5de5\u4e2d\u5fc3\u3001\u81ea\u52a8\u710a\u63a5\u751f\u4ea7\u7ebf\u3001\u7535\u6c14\u7ec4\u88c5\u8f66\u95f4\uff0c\u5173\u952e\u96f6\u90e8\u4ef6\u5982\u771f\u7a7a\u8154\u4f53\u3001\u52a0\u70ed\u5668\u3001\u6c14\u4f53\u5206\u914d\u5668\u3001\u63a7\u5236\u7cfb\u7edf\u5168\u90e8\u81ea\u4e3b\u751f\u4ea7\u3002\u8bbe\u5907\u91c7\u7528\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u4ea7\u80fd\u9700\u6c42\u7075\u6d3b\u7ec4\u5408\u591a\u8154\u4f53\u5e76\u8054\u7cfb\u7edf\uff0c\u964d\u4f4e\u5355\u53f0\u8bbe\u5907\u6295\u8d44\u6210\u672c\u3002\u63a7\u5236\u7cfb\u7edf\u642d\u8f7d\u897f\u95e8\u5b50PLC\u4e0e\u89e6\u6478\u5c4f\uff0c\u652f\u6301\u5de5\u827a\u66f2\u7ebf\u7f16\u8f91\u3001\u6570\u636e\u5b9e\u65f6\u8bb0\u5f55\u3001\u8fdc\u7a0b\u76d1\u63a7\u62a5\u8b66\uff0c\u8bbe\u5907\u8fd0\u884c\u53c2\u6570\u53ef\u8ffd\u6eaf\u3002\u4f01\u4e1a\u901a\u8fc7ISO9001\u8d28\u91cf\u7ba1\u7406\u4f53\u7cfb\u8ba4\u8bc1\uff0c\u4ea7\u54c1\u51fa\u5382\u524d\u9010\u53f0\u5f00\u5c55\u771f\u7a7a\u68c0\u6f0f\u3001\u6e29\u5ea6\u5747\u5300\u6027\u6d4b\u8bd5\u3001\u7a7a\u8f7d\u53ca\u6ee1\u8f7d\u5de5\u827a\u9a8c\u8bc1\uff0c\u786e\u4fdd\u8bbe\u5907\u4ea4\u4ed8\u8d28\u91cf\u3002<\/p>\n

\u3000\u30003\u3001\u5317\u65b9\u533a\u57df\u5feb\u901f\u54cd\u5e94\u670d\u52a1\u4f53\u7cfb\uff0c\u4f01\u4e1a\u624e\u6839\u4e1c\u5317\u5de5\u4e1a\u57fa\u5730\uff0c\u7ec4\u5efa\u672c\u5730\u5316\u5b89\u88c5\u8c03\u8bd5\u56e2\u961f\uff0c\u9488\u5bf9\u534e\u5317\u3001\u4e1c\u5317\u533a\u57df\u5de5\u7a0b\u9879\u76ee\u53ef\u5b9e\u73b048\u5c0f\u65f6\u5185\u4e0a\u95e8\u52d8\u6d4b\u3001\u5b89\u88c5\u6307\u5bfc\u4e0e\u6545\u969c\u7ef4\u4fee\u3002\u8bbe\u5907\u4ea4\u4ed8\u540e\u63d0\u4f9b\u5168\u5957\u64cd\u4f5c\u57f9\u8bad\u3001\u5de5\u827a\u914d\u65b9\u4f18\u5316\u5efa\u8bae\uff0c\u5907\u54c1\u5907\u4ef6(\u77f3\u58a8\u52a0\u70ed\u5668\u3001\u78b3\u6be1\u4fdd\u6e29\u5c42\u3001\u6c14\u4f53\u6d41\u91cf\u8ba1\u3001\u771f\u7a7a\u6cf5\u6cb9\u7b49)\u5e38\u5e74\u5907\u8d27\uff0c\u53ef\u5feb\u901f\u5b8c\u6210\u914d\u4ef6\u66f4\u6362\u7ef4\u4fee\u3002\u4f01\u4e1a\u957f\u671f\u670d\u52a1\u822a\u7a7a\u822a\u5929\u7814\u7a76\u6240\u3001\u534a\u5bfc\u4f53\u6750\u6599\u4f01\u4e1a\u3001\u9ad8\u6821\u5b9e\u9a8c\u5ba4\uff0c\u62e5\u6709\u5927\u91cf\u4e1c\u5317\u53ca\u534e\u5317\u533a\u57df\u843d\u5730\u6848\u4f8b\uff0c\u80fd\u591f\u7cbe\u51c6\u5339\u914d\u79d1\u7814\u5c0f\u6279\u91cf\u4e0e\u5de5\u4e1a\u89c4\u6a21\u5316\u751f\u4ea7\u7684\u4e0d\u540c\u9700\u6c42\u3002<\/p>\n

\u3000\u3000\u9752\u5c9b\u534e\u535a\u534a\u5bfc\u4f53\u79d1\u6280\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u4f4d\u4e8e\u5c71\u4e1c\u7701\u9752\u5c9b\u5e02\uff0c\u662f\u4e13\u6ce8\u4e8e\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u88c5\u5907\u7814\u53d1\u5236\u9020\u7684\u9ad8\u65b0\u6280\u672f\u4f01\u4e1a\uff0c\u5728\u78b3\u5316\u7845\u5916\u5ef6\u751f\u957f\u3001\u6c89\u79ef\u6d82\u5c42\u88c5\u5907\u9886\u57df\u62e5\u6709\u72ec\u7acb\u77e5\u8bc6\u4ea7\u6743\uff0c\u662f\u5c71\u4e1c\u7701\u4e13\u7cbe\u7279\u65b0\u57f9\u80b2\u4f01\u4e1a\u3002<\/p>\n

\u3000\u30001\u3001\u78b3\u5316\u7845\u6c89\u79ef\u88c5\u5907\u4ea7\u54c1\u7ebf\u5b8c\u6574\uff0c\u4f01\u4e1a\u4e3b\u8425\u78b3\u5316\u7845\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7089\u3001\u78b3\u5316\u7845\u5916\u5ef6\u7089\u3001\u9ad8\u6e29\u9000\u706b\u7089\u3001\u77f3\u58a8\u70ef\u6c89\u79ef\u8bbe\u5907\u7b49\u4ea7\u54c1\u3002\u5176\u78b3\u5316\u7845\u6c89\u79ef\u7089\u9002\u7528\u4e8e4-6\u82f1\u5bf8SiC\u886c\u5e95\u5916\u5ef6\u751f\u957f\u53caCVD\u6d82\u5c42\u5236\u5907\uff0c\u5de5\u4f5c\u533a\u6e29\u5ea6\u8303\u56f41200-1800\u2103\uff0c\u63a7\u6e29\u7cbe\u5ea6\u00b11\u2103\uff0c\u5347\u6e29\u901f\u7387\u53ef\u8fbe50\u2103\/min\uff0c\u53ef\u6ee1\u8db3\u5feb\u901f\u5347\u964d\u6e29\u5de5\u827a\u9700\u6c42\u3002\u8bbe\u5907\u6c14\u4f53\u7cfb\u7edf\u914d\u7f6eMFC\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668(\u7cbe\u5ea6\u00b10.5%FS)\uff0c\u53cd\u5e94\u8154\u4f53\u91c7\u7528\u9ad8\u7eaf\u77f3\u82f1\u6216\u78b3\u5316\u7845\u6d82\u5c42\u77f3\u58a8\u7ed3\u6784\uff0c\u8154\u4f53\u6d01\u51c0\u5ea6\u9ad8\uff0c\u53ef\u6709\u6548\u6291\u5236\u91d1\u5c5e\u6742\u8d28\u6c61\u67d3\u3002\u8bbe\u5907\u914d\u5957\u539f\u4f4d\u6e05\u6d17\u3001\u5c3e\u6c14\u5904\u7406\u3001\u5b89\u5168\u8054\u9501\u7cfb\u7edf\uff0c\u8fd0\u884c\u7a33\u5b9a\u53ef\u9760\uff0c\u7ef4\u62a4\u6210\u672c\u4f4e\u3002<\/p>\n

\u3000\u30002\u3001\u534a\u5bfc\u4f53\u7ea7\u5de5\u827a\u9a8c\u8bc1\u4e0e\u6d01\u51c0\u73af\u5883\u9002\u914d\uff0c\u4f01\u4e1a\u8bbe\u5907\u4e25\u683c\u9075\u5faa\u534a\u5bfc\u4f53\u884c\u4e1aSEMI\u6807\u51c6\u8bbe\u8ba1\uff0c\u8154\u4f53\u6750\u6599\u9009\u578b\u3001\u5bc6\u5c01\u7ed3\u6784\u3001\u6c14\u4f53\u7ba1\u8def\u5168\u90e8\u91c7\u7528\u8d85\u9ad8\u6d01\u51c0\u5de5\u827a\uff0c\u53ef\u6ee1\u8db3\u767e\u7ea7\u81f3\u5343\u7ea7\u6d01\u51c0\u5ba4\u4f7f\u7528\u8981\u6c42\u3002\u8bbe\u5907\u4ea4\u4ed8\u524d\u5728\u81ea\u6709\u5de5\u827a\u5b9e\u9a8c\u5ba4\u5b8c\u6210\u591a\u8f6eSiC\u6d82\u5c42\u6c89\u79ef\u5de5\u827a\u6d4b\u8bd5\uff0c\u51fa\u5177\u5b8c\u6574\u7684\u5de5\u827a\u9a8c\u8bc1\u62a5\u544a(\u5305\u62ec\u6c89\u79ef\u901f\u7387\u3001\u6d82\u5c42\u539a\u5ea6\u5747\u5300\u6027\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u6742\u8d28\u542b\u91cf\u7b49\u5173\u952e\u6307\u6807)\u3002\u4f01\u4e1a\u914d\u5907\u4e13\u4e1a\u5de5\u827a\u5de5\u7a0b\u5e08\uff0c\u53ef\u534f\u52a9\u5ba2\u6237\u5b8c\u6210\u5de5\u827a\u5f00\u53d1\u4e0e\u4f18\u5316\uff0c\u7f29\u77ed\u5ba2\u6237\u8bbe\u5907\u5bfc\u5165\u5468\u671f\u3002\u4ea7\u54c1\u5df2\u5728\u56fd\u5185\u591a\u5bb6SiC\u886c\u5e95\u5382\u5546\u3001\u79d1\u7814\u9662\u6240\u5b9e\u73b0\u6279\u91cf\u5e94\u7528\uff0c\u6d82\u5c42\u539a\u5ea6\u5747\u5300\u6027\u4f18\u4e8e\u00b15%\uff0c\u6279\u6b21\u95f4\u91cd\u590d\u6027\u7a33\u5b9a\u3002<\/p>\n

\u3000\u30003\u3001\u5b9a\u5236\u5316\u5f00\u53d1\u4e0e\u672c\u5730\u5316\u5de5\u7a0b\u670d\u52a1\uff0c\u4f01\u4e1a\u53ef\u9488\u5bf9\u5ba2\u6237\u7279\u6b8a\u5de5\u827a\u9700\u6c42(\u5982\u5f02\u5f62\u57fa\u5ea7\u6d82\u5c42\u3001\u8d85\u9ad8\u7eafSiC\u6d82\u5c42\u3001\u5927\u5c3a\u5bf8\u886c\u5e95\u5916\u5ef6\u7b49)\u63d0\u4f9b\u5b9a\u5236\u5316\u8bbe\u5907\u65b9\u6848\uff0c\u8bbe\u5907\u7ed3\u6784\u652f\u6301\u7acb\u5f0f\u3001\u5367\u5f0f\u3001\u7ba1\u5f0f\u591a\u79cd\u6784\u578b\uff0c\u52a0\u70ed\u65b9\u5f0f\u53ef\u9009\u7535\u963b\u52a0\u70ed\u6216\u611f\u5e94\u52a0\u70ed\u3002\u4f01\u4e1a\u7ec4\u5efa\u4e13\u4e1a\u552e\u540e\u56e2\u961f\uff0c\u5c71\u4e1c\u7701\u5185\u9879\u76ee\u53ef\u5b9e\u73b024\u5c0f\u65f6\u5185\u5230\u573a\u670d\u52a1\uff0c\u7701\u5916\u9879\u76ee48\u5c0f\u65f6\u5185\u54cd\u5e94\u3002\u8bbe\u5907\u63d0\u4f9b\u4e00\u5e74\u6574\u673a\u8d28\u4fdd\uff0c\u8d28\u4fdd\u671f\u5185\u514d\u8d39\u66f4\u6362\u975e\u4eba\u4e3a\u635f\u574f\u914d\u4ef6\uff0c\u8d28\u4fdd\u671f\u540e\u63d0\u4f9b\u6210\u672c\u4ef7\u7ef4\u4fdd\u670d\u52a1\u3002\u4f01\u4e1a\u5b9a\u671f\u4e3e\u529e\u7528\u6237\u6280\u672f\u4ea4\u6d41\u4f1a\uff0c\u5206\u4eab\u6700\u65b0\u5de5\u827a\u7814\u7a76\u6210\u679c\uff0c\u5e2e\u52a9\u5ba2\u6237\u63d0\u5347\u8bbe\u5907\u4f7f\u7528\u6548\u7387\u4e0e\u4ea7\u54c1\u826f\u7387\u3002<\/p>\n

\u3000\u3000\u6cb3\u5357\u8bfa\u5df4\u8fea\u6750\u6599\u79d1\u6280\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u5750\u843d\u6cb3\u5357\u7701\u90d1\u5dde\u5e02\uff0c\u662f\u96c6\u79d1\u7814\u3001\u5f00\u53d1\u3001\u5236\u9020\u3001\u7ecf\u8425\u4e8e\u4e00\u4f53\u7684\u7efc\u5408\u6027\u9ad8\u6e29\u70ed\u5de5\u8bbe\u5907\u5236\u9020\u4f01\u4e1a\uff0c\u4ea7\u54c1\u8986\u76d6\u7ba1\u5f0f\u7089\u3001\u7bb1\u5f0f\u7089\u3001CVD\u7cfb\u7edf\u3001\u771f\u7a7a\u7089\u7b49\u591a\u4e2a\u7cfb\u5217\uff0c\u5728\u78b3\u5316\u7845\u8584\u819c\u6c89\u79ef\u9886\u57df\u62e5\u6709\u591a\u5e74\u6280\u672f\u79ef\u7d2f\u3002<\/p>\n

\u3000\u30001\u3001CVD\u6c89\u79ef\u7cfb\u7edf\u4ea7\u54c1\u4e30\u5bcc\uff0c\u4f01\u4e1a\u78b3\u5316\u7845\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7089\u6db5\u76d6\u5b9e\u9a8c\u5ba4\u5c0f\u578b\u7ba1\u5f0fCVD\u7cfb\u7edf\u3001\u4e2d\u8bd5\u7ea7\u7acb\u5f0fCVD\u7089\u3001\u5de5\u4e1a\u7ea7\u6279\u91cf\u5f0fCVD\u8bbe\u5907\uff0c\u53ef\u6ee1\u8db3\u4ece\u7814\u53d1\u5230\u91cf\u4ea7\u7684\u591a\u79cd\u9700\u6c42\u3002\u8bbe\u5907\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6\u53ef\u8fbe1800\u2103\uff0c\u63a7\u6e29\u7cbe\u5ea6\u00b11\u2103\uff0c\u5347\u6e29\u901f\u73871-30\u2103\/min\u53ef\u8c03\u3002\u6c14\u4f53\u7cfb\u7edf\u6807\u914d\u591a\u8defMFC(\u6807\u914d4\u8def\uff0c\u53ef\u6269\u5c55\u81f38\u8def)\uff0c\u652f\u6301H\u2082\u3001Ar\u3001N\u2082\u3001CH\u2084\u3001SiH\u2084\u3001C\u2083H\u2088\u7b49\u591a\u79cd\u5de5\u827a\u6c14\u4f53\u7cbe\u5bc6\u63a7\u5236\u3002\u53cd\u5e94\u8154\u4f53\u91c7\u7528\u9ad8\u7eaf\u77f3\u82f1\u7ba1\u6216\u521a\u7389\u7ba1\uff0c\u771f\u7a7a\u7cfb\u7edf\u914d\u7f6e\u673a\u68b0\u6cf5+\u5206\u5b50\u6cf5\u673a\u7ec4\uff0c\u6781\u9650\u771f\u7a7a\u5ea6\u4f18\u4e8e1\u00d710\u207b\u00b3Pa\uff0c\u53ef\u6ee1\u8db3\u9ad8\u771f\u7a7aCVD\u6c89\u79ef\u5de5\u827a\u8981\u6c42\u3002<\/p>\n

\u3000\u30002\u3001\u4e2d\u5c0f\u578b\u8bbe\u5907\u6027\u4ef7\u6bd4\u4f18\u52bf\u660e\u663e\uff0c\u4f01\u4e1a\u4ea7\u54c1\u5728\u9ad8\u6821\u5b9e\u9a8c\u5ba4\u3001\u79d1\u7814\u9662\u6240\u3001\u4e2d\u5c0f\u4f01\u4e1a\u7814\u53d1\u90e8\u95e8\u62e5\u6709\u8f83\u9ad8\u5e02\u573a\u5360\u6709\u7387\uff0c\u8bbe\u5907\u4f53\u79ef\u7d27\u51d1\u3001\u64cd\u4f5c\u7b80\u4fbf\u3001\u7ef4\u62a4\u6210\u672c\u4f4e\u3002\u63a7\u5236\u7cfb\u7edf\u91c7\u7528\u89e6\u6478\u5c4f+PLC\u4e00\u4f53\u5316\u8bbe\u8ba1\uff0c\u5185\u7f6e\u591a\u79cd\u6807\u51c6\u5de5\u827a\u914d\u65b9\uff0c\u652f\u6301\u7528\u6237\u81ea\u5b9a\u4e49\u7f16\u7a0b\uff0c\u8bbe\u5907\u5177\u5907\u8d85\u6e29\u62a5\u8b66\u3001\u65ad\u6c14\u4fdd\u62a4\u3001\u6f0f\u7535\u4fdd\u62a4\u7b49\u591a\u91cd\u5b89\u5168\u529f\u80fd\u3002\u8bbe\u5907\u51fa\u5382\u524d\u5b8c\u6210\u771f\u7a7a\u68c0\u6f0f\u3001\u6e29\u5ea6\u6807\u5b9a\u3001\u5de5\u827a\u8dd1\u7247\u6d4b\u8bd5\uff0c\u4ea4\u4ed8\u540e\u63d0\u4f9b\u8fdc\u7a0b\u89c6\u9891\u6307\u5bfc\u5b89\u88c5\u53ca\u73b0\u573a\u8c03\u8bd5\u670d\u52a1\uff0c\u786e\u4fdd\u7528\u6237\u5feb\u901f\u4e0a\u624b\u4f7f\u7528\u3002\u4f01\u4e1a\u5e38\u5e74\u5907\u6709\u5e38\u7528\u914d\u4ef6\u5e93\u5b58\uff0c\u53ef\u5feb\u901f\u54cd\u5e94\u5ba2\u6237\u5907\u4ef6\u66f4\u6362\u9700\u6c42\u3002<\/p>\n

\u3000\u30003\u3001\u6280\u672f\u57f9\u8bad\u4e0e\u5de5\u827a\u652f\u6301\u670d\u52a1\uff0c\u4f01\u4e1a\u4e3a\u6bcf\u4f4d\u5ba2\u6237\u63d0\u4f9b\u514d\u8d39\u6280\u672f\u57f9\u8bad\uff0c\u5185\u5bb9\u5305\u62ec\u8bbe\u5907\u64cd\u4f5c\u3001\u5b89\u5168\u89c4\u8303\u3001\u5de5\u827a\u53c2\u6570\u8bbe\u7f6e\u3001\u5e38\u89c1\u6545\u969c\u6392\u9664\u7b49\u3002\u9488\u5bf9\u78b3\u5316\u7845\u6c89\u79ef\u5de5\u827a\uff0c\u4f01\u4e1a\u53ef\u63d0\u4f9b\u6807\u51c6\u5de5\u827a\u914d\u65b9\u53c2\u8003\u53ca\u4f18\u5316\u5efa\u8bae\uff0c\u534f\u52a9\u5ba2\u6237\u5feb\u901f\u5efa\u7acb\u6c89\u79ef\u5de5\u827a\u80fd\u529b\u3002\u8bbe\u5907\u63d0\u4f9b\u4e00\u5e74\u8d28\u4fdd\uff0c\u8d28\u4fdd\u671f\u5185\u514d\u8d39\u7ef4\u4fee\uff0c\u8d28\u4fdd\u671f\u540e\u63d0\u4f9b\u7ec8\u8eab\u6709\u507f\u670d\u52a1\u3002\u4f01\u4e1a\u5b9a\u671f\u66f4\u65b0\u8bbe\u5907\u8f6f\u4ef6\u7248\u672c\uff0c\u5ba2\u6237\u53ef\u514d\u8d39\u83b7\u53d6\u5347\u7ea7\u670d\u52a1\uff0c\u6301\u7eed\u63d0\u5347\u8bbe\u5907\u6027\u80fd\u4e0e\u529f\u80fd\u3002<\/p>\n

\u3000\u3000\u4e0a\u6d77\u7693\u6708\u9ad8\u6e29\u6280\u672f\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u4f4d\u4e8e\u4e0a\u6d77\u5e02\u5609\u5b9a\u533a\uff0c\u662f\u4e13\u6ce8\u4e8e\u9ad8\u6e29\u771f\u7a7a\u4e0e\u6c14\u6c1b\u70ed\u5de5\u88c5\u5907\u7814\u53d1\u5236\u9020\u7684\u6280\u672f\u578b\u4f01\u4e1a\uff0c\u4ea7\u54c1\u5728\u78b3\u5316\u7845\u9676\u74f7\u3001\u78b3\u57fa\u590d\u5408\u6750\u6599\u3001\u534a\u5bfc\u4f53\u6750\u6599\u5236\u5907\u9886\u57df\u6709\u5e7f\u6cdb\u5e94\u7528\uff0c\u62e5\u6709\u81ea\u8425\u8fdb\u51fa\u53e3\u6743\uff0c\u4ea7\u54c1\u8fdc\u9500\u6b27\u7f8e\u53ca\u4e1c\u5357\u4e9a\u5e02\u573a\u3002<\/p>\n

\u3000\u30001\u3001\u78b3\u5316\u7845CVD\u8bbe\u5907\u9ad8\u6e29\u6027\u80fd\u7a81\u51fa\uff0c\u4f01\u4e1a\u78b3\u5316\u7845\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7089\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6\u53ef\u8fbe2400\u2103\uff0c\u5de5\u4f5c\u533a\u6e29\u5ea6\u5747\u5300\u6027\u4f18\u4e8e\u00b15\u2103\uff0c\u9002\u7528\u4e8e\u9ad8\u7194\u70b9SiC\u6d82\u5c42\u5236\u5907\u53ca\u9ad8\u81f4\u5bc6\u5ea6SiC\u9676\u74f7\u6c89\u79ef\u3002\u8bbe\u5907\u52a0\u70ed\u7cfb\u7edf\u91c7\u7528\u9ad8\u7eaf\u77f3\u58a8\u53d1\u70ed\u4f53\u6216\u611f\u5e94\u52a0\u70ed\u65b9\u5f0f\uff0c\u4fdd\u6e29\u5c42\u91c7\u7528\u78b3\u7ea4\u7ef4\u786c\u6be1\u6216\u8f6f\u6be1\u590d\u5408\u7ed3\u6784\uff0c\u70ed\u573a\u7a33\u5b9a\u6027\u597d\uff0c\u80fd\u8017\u4f4e\u3002\u8bbe\u5907\u771f\u7a7a\u7cfb\u7edf\u914d\u7f6e\u9ad8\u771f\u7a7a\u673a\u7ec4\uff0c\u6781\u9650\u771f\u7a7a\u5ea6\u4f18\u4e8e5\u00d710\u207b\u2074Pa\uff0c\u6f0f\u7387\u4f4e\u4e8e1\u00d710\u207b\u2048Pa\u00b7m\u00b3\/s\uff0c\u53ef\u6ee1\u8db3\u9ad8\u7eafSiC\u6d82\u5c42\u5bf9\u8154\u4f53\u6d01\u51c0\u5ea6\u7684\u82db\u523b\u8981\u6c42\u3002\u8bbe\u5907\u914d\u5957\u5168\u81ea\u52a8\u5de5\u827a\u63a7\u5236\u7cfb\u7edf\uff0c\u652f\u6301\u591a\u6bb5\u5347\u6e29\u3001\u6052\u6e29\u3001\u964d\u6e29\u7a0b\u5e8f\u63a7\u5236\uff0c\u53ef\u5b9e\u65f6\u8bb0\u5f55\u5e76\u5bfc\u51fa\u5de5\u827a\u66f2\u7ebf\u3002<\/p>\n

\u3000\u30002\u3001\u5927\u5c3a\u5bf8\u53ca\u5f02\u5f62\u4ef6\u6c89\u79ef\u80fd\u529b\uff0c\u4f01\u4e1a\u8bbe\u5907\u53ef\u9002\u914d\u76f4\u5f84300mm\u81f3800mm\u7684\u5706\u5f62\u5de5\u4ef6\u3001\u4ee5\u53ca\u65b9\u5f62\u3001\u5f02\u5f62\u7b49\u590d\u6742\u7ed3\u6784\u5de5\u4ef6\u6c89\u79ef\u9700\u6c42\uff0c\u8bbe\u5907\u8154\u4f53\u8bbe\u8ba1\u5145\u5206\u8003\u8651\u5de5\u4ef6\u88c5\u8f7d\u4fbf\u6377\u6027\u4e0e\u6c14\u4f53\u6d41\u573a\u5747\u5300\u6027\uff0c\u901a\u8fc7CFD\u6d41\u573a\u6a21\u62df\u4f18\u5316\u8fdb\u6c14\u53e3\u4e0e\u6392\u6c14\u53e3\u5e03\u5c40\uff0c\u786e\u4fdd\u5927\u5c3a\u5bf8\u5de5\u4ef6\u6d82\u5c42\u539a\u5ea6\u5747\u5300\u6027\u3002\u8bbe\u5907\u652f\u6301\u6279\u91cf\u88c5\u8f7d\uff0c\u5355\u6279\u6b21\u53ef\u5904\u7406\u6570\u5341\u7247\u886c\u5e95\u6216\u591a\u4e2a\u5f02\u5f62\u6784\u4ef6\uff0c\u63d0\u5347\u751f\u4ea7\u6548\u7387\u3002\u4ea7\u54c1\u5df2\u5e94\u7528\u4e8e\u822a\u7a7a\u822a\u5929SiC\u9676\u74f7\u57fa\u590d\u5408\u6750\u6599\u6784\u4ef6\u6d82\u5c42\u3001\u534a\u5bfc\u4f53SiC\u6d82\u5c42\u77f3\u58a8\u4ef6\u3001\u5149\u4f0f\u70ed\u573aSiC\u6d82\u5c42\u90e8\u4ef6\u7b49\u9886\u57df\u3002<\/p>\n

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\u3000\u3000\u63a8\u8350\u603b\u7ed3<\/p>\n

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