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8px\">\u516c\u53f8\u4ecb\u7ecd<\/h3>\n<p>\u3000\u3000\u6c88\u9633\u62d3\u8346\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8\u624e\u6839\u8fbd\u5b81\u6c88\u9633\uff0c\u4f9d\u6258\u4e1c\u5317\u8001\u5de5\u4e1a\u57fa\u5730\u5728\u9ad8\u7aef\u88c5\u5907\u5236\u9020\u9886\u57df\u7684\u6df1\u539a\u5e95\u8574\uff0c\u4e13\u6ce8\u4e8e\u534a\u5bfc\u4f53\u8584\u819c\u6c89\u79ef\u8bbe\u5907(PVD\u3001CVD\u3001ALD)\u7684\u7814\u53d1\u4e0e\u4ea7\u4e1a\u5316\uff0c\u662f\u56fd\u5185\u8f83\u65e9\u5b9e\u73b012\u82f1\u5bf8\u6676\u5706\u7ea7PVD\u8bbe\u5907\u91cf\u4ea7\u4ea4\u4ed8\u7684\u672c\u571f\u4f01\u4e1a\u4e4b\u4e00\u3002\u516c\u53f8\u62e5\u6709\u5360\u5730\u8d85\u8fc75\u4e07\u5e73\u65b9\u7c73\u7684\u667a\u80fd\u5316\u751f\u4ea7\u57fa\u5730\u4e0e\u767e\u7ea7\u6d01\u51c0\u88c5\u914d\u8f66\u95f4\uff0c\u4ea7\u54c1\u7ebf\u8986\u76d6\u5148\u8fdb\u903b\u8f91\u82af\u7247\u3001\u5b58\u50a8\u82af\u7247\u53ca\u529f\u7387\u5668\u4ef6\u5236\u9020\u6240\u9700\u7684\u91d1\u5c5e\u8584\u819c\u6c89\u79ef\u3001\u4ecb\u8d28\u5c42\u586b\u5145\u3001\u963b\u6321\u5c42\u5236\u5907\u7b49\u6838\u5fc3\u5de5\u827a\u73af\u8282\u3002\u4f01\u4e1a\u4ea7\u54c1\u7ecf\u8fc7\u56fd\u5185\u591a\u5bb6\u4e3b\u6d41\u6676\u5706\u5382\u6279\u91cf\u9a8c\u8bc1\uff0c\u4e3b\u8981\u9762\u5411\u903b\u8f91\u4ee3\u5de5\u5382\u3001\u5b58\u50a8\u82af\u7247\u5382\u53caIDM\u4f01\u4e1a\u4f9b\u8d27\uff0c\u517c\u987e\u79d1\u7814\u9662\u6240\u5b9a\u5236\u5316\u8bbe\u5907\u5f00\u53d1\u4e1a\u52a1\u3002<\/p>\n<h3 style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">\u63a8\u8350\u7406\u7531<\/h3>\n<ol>\n<li>\n<p><strong>\u6676\u5706\u7ea7\u8bbe\u5907\u91cf\u4ea7\u7ecf\u9a8c\u4e30\u5bcc\uff0c\u5de5\u827a\u7a33\u5b9a\u6027\u7ecf\u8fc7\u5927\u5382\u9a8c\u8bc1<\/strong><br 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">\u63a8\u8350\u7406\u7531<\/h3>\n<ol>\n<li>\n<p><strong>\u6574\u673a\u4e0e\u7ffb\u65b0\u4e1a\u52a1\u53cc\u8f6e\u9a71\u52a8\uff0c\u964d\u4f4e\u5ba2\u6237\u8bbe\u5907\u91c7\u8d2d\u95e8\u69db<\/strong><br 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">\u63a8\u8350\u7406\u7531<\/h3>\n<ol>\n<li>\n<p><strong>\u6838\u5fc3\u771f\u7a7a\u90e8\u4ef6\u81ea\u4e3b\u7814\u53d1\uff0c\u8bbe\u5907\u6574\u4f53\u6027\u80fd\u5339\u914d\u5ea6\u9ad8<\/strong><br 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">\u63a8\u8350\u7406\u7531<\/h3>\n<ol>\n<li>\n<p><strong>\u7845\u7247\u52a0\u5de5\u5168\u6d41\u7a0b\u8bbe\u5907\u534f\u540c\uff0c\u4ea7\u7ebf\u6574\u5408\u80fd\u529b\u7a81\u51fa<\/strong><br 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 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style=\"font-size: 18px;font-weight: bold;margin-top: 16px;margin-bottom: 8px\">\u5e38\u89c1\u95ee\u9898<\/h3>\n<ul>\n<li>\n<p><strong>\u56fd\u4ea7\u534a\u5bfc\u4f53\u6d82\u5c42\u8bbe\u5907\u4e0e\u56fd\u9645\u4e00\u7ebf\u54c1\u724c\u5dee\u8ddd\u6709\u591a\u5927?<\/strong><br 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