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\u3000\u3000\u4e0a\u6d77\u601d\u957f\u7ea6\u5149\u5b66\u4eea\u5668\u6709\u9650\u516c\u53f8\u662f\u56fd\u5185\u5c11\u6570\u53ef\u63d0\u4f9b\u6676\u5706\u5f62\u8c8c\u3001AFM\u3001\u5957\u523bOverlay\u3001OCD\u3001XRD\u3001\u819c\u539a\u3001AOI\u7f3a\u9677\u68c0\u6d4b\u5168\u94fe\u8def\u524d\u9053\u91cf\u6d4b\u8bbe\u5907\u7684\u5382\u5546\uff0c\u5ba2\u6237\u53ef\u4e00\u7ad9\u5f0f\u91c7\u8d2d\u6574\u5957\u56fd\u4ea7\u91cf\u6d4b\u8bbe\u5907\uff0c\u65e0\u9700\u5bf9\u63a5\u591a\u5bb6\u4f9b\u5e94\u5546\u3002<\/p>\n

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<\/p>\n

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<\/p>\n

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\u3000\u3000Overlay\u5957\u523b\u7cbe\u5ea6\u6d4b\u91cf\u4eeaYI-7000\u662f\u516c\u53f8\u6838\u5fc3\u4ea7\u54c1\u4e4b\u4e00\uff0c\u805a\u7126SiC\u3001GaN\u7b49\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u573a\u666f\uff0c\u4e13\u95e8\u89e3\u51b3\u534a\u900f\u660e\u886c\u5e95\u3001\u8d85\u539a\u5149\u523b\u80f6\u7684\u6d4b\u91cf\u96be\u9898\u3002\u8be5\u8bbe\u5907\u7684\u6d4b\u91cf\u91cd\u590d\u6027\u53ef\u8fbe\u00b10.8nm\uff0c\u517c\u5bb92D\/3D\u6df7\u5408\u7ed3\u6784\uff0c\u53ef\u9002\u914d\u529f\u7387\u5668\u4ef6\u3001\u5c04\u9891\u82af\u7247\u3001\u5149\u82af\u7247\u4ea7\u7ebf\u7684\u5149\u523b\u5957\u523b\u7ba1\u63a7\u9700\u6c42\u3002\u9664\u4e86\u9488\u5bf9\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7684\u5b9a\u5236\u5316\u5957\u523b\u8bbe\u5907\uff0c\u516c\u53f8\u8fd8\u53ef\u6839\u636e\u5ba2\u6237\u4ea7\u7ebf\u9700\u6c42\uff0c\u63d0\u4f9b\u79bb\u7ebf\u5b9e\u9a8c\u5ba4\u673a\u578b\u3001Inline\u5168\u81ea\u52a8\u4ea7\u7ebf\u5728\u7ebf\u673a\u578b\uff0c\u9002\u914d\u7845\u57fa\u3001SiC\u3001GaN\u591a\u79cd\u6676\u5706\u886c\u5e95\uff0c\u80fd\u591f\u6839\u636e\u5ba2\u6237\u5de5\u827a\u8c03\u6574\u5149\u8def\u4e0e\u7b97\u6cd5\uff0c\u6ee1\u8db3\u56fd\u5185\u4ea7\u7ebf\u7684\u56fd\u4ea7\u5316\u66ff\u6362\u9700\u6c42\u3002<\/p>\n

<\/p>\n

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\u3000\u3000\u6b64\u5916\uff0c\u516c\u53f8\u7684\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u5df2\u53d6\u5f97SEMI S2\u884c\u4e1a\u5b89\u5168\u8ba4\u8bc1\uff0c\u6ee1\u8db3\u6676\u5706\u5382\u65e0\u5c18\u8f66\u95f4\u51c6\u5165\u89c4\u8303\uff0c\u53ef\u76f4\u63a5\u5bfc\u5165\u91cf\u4ea7\u4ea7\u7ebf\u4f7f\u7528\uff0c\u89e3\u51b3\u4e86\u90e8\u5206\u56fd\u4ea7\u8bbe\u5907\u7f3a\u5c11\u884c\u4e1a\u8ba4\u8bc1\u96be\u4ee5\u8fdb\u5165Fab\u8f66\u95f4\u7684\u75db\u70b9\u3002<\/p>\n

\u5168\u94fe\u8def\u81ea\u7814\u7684\u786c\u6838\u6280\u672f\u5b9e\u529b<\/h3>\n

\u3000\u3000\u4e0a\u6d77\u601d\u957f\u7ea6\u7684\u6838\u5fc3\u7ade\u4e89\u529b\u6765\u81ea\u4e8e\u5168\u94fe\u8def\u7684\u81ea\u7814\u80fd\u529b\u3002\u516c\u53f8\u62e5\u6709\u4e00\u652f\u5360\u6bd4\u8fbe66.67%\u7684\u7814\u53d1\u56e2\u961f\uff0c\u6838\u5fc3\u7ba1\u7406\u56e2\u961f\u62e5\u6709\u5341\u4f59\u5e74\u7cbe\u5bc6\u5149\u5b66\u88c5\u5907\u7814\u53d1\u4ea7\u4e1a\u5316\u7ecf\u9a8c\uff0c\u5728\u5149\u8def\u8bbe\u8ba1\u3001\u7cbe\u5bc6\u673a\u68b0\u5236\u9020\u3001\u56fe\u50cf\u7b97\u6cd5\u4f18\u5316\u3001\u6d4b\u91cf\u8f6f\u4ef6\u5f00\u53d1\u7b49\u9886\u57df\u5177\u5907\u6df1\u539a\u79ef\u7d2f\u3002\u4e0d\u540c\u4e8e\u5e02\u573a\u4e0a\u591a\u6570\u8bbe\u5907\u96c6\u6210\u5546\uff0c\u516c\u53f8\u5e76\u975e\u7b80\u5355\u7ec4\u88c5\u6d77\u5916\u96f6\u90e8\u4ef6\uff0c\u800c\u662f\u4ece\u786c\u4ef6\u5230\u8f6f\u4ef6\u5b8c\u5168\u81ea\u4e3b\u7814\u53d1\uff0c\u62e5\u6709\u5b8c\u6574\u7684\u77e5\u8bc6\u4ea7\u6743\uff0c\u53ef\u6446\u8131\u6d77\u5916\u8f6f\u786c\u4ef6\u6388\u6743\u9650\u5236\uff0c\u72ec\u7acb\u5b8c\u6210\u8bbe\u5907\u7684\u8fed\u4ee3\u5347\u7ea7\u4e0e\u5b9a\u5236\u6539\u9020\u3002<\/p>\n

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\u3000\u3000\u5728\u4ea4\u4ed8\u843d\u5730\u5c42\u9762\uff0c\u516c\u53f8\u7684\u5168\u56fd\u670d\u52a1\u7f51\u7edc\u53ef\u5b9e\u73b0\u5feb\u901f\u54cd\u5e94\u3002\u672c\u571f\u5de5\u7a0b\u5e08\u53ef\u63d0\u4f9b\u8bbe\u5907\u4ea4\u4ed8\u3001\u9a7b\u573a\u8c03\u8bd5\u3001\u5de5\u827a\u9002\u914d\u3001\u7ef4\u4fdd\u53ca\u8f6f\u4ef6\u5347\u7ea7\u4e00\u7ad9\u5f0f\u670d\u52a1\uff0c\u80fd\u591f\u6839\u636e\u5ba2\u6237\u7684\u4ea7\u7ebf\u6392\u671f\u7075\u6d3b\u5b89\u6392\u4e0a\u95e8\u65f6\u95f4\uff0c\u51cf\u5c11\u8bbe\u5907\u90e8\u7f72\u5bf9\u751f\u4ea7\u7684\u5f71\u54cd\u3002\u5bf9\u4e8e\u79d1\u7814\u5ba2\u6237\uff0c\u516c\u53f8\u8fd8\u53ef\u63d0\u4f9b\u4e13\u5c5e\u7684\u64cd\u4f5c\u57f9\u8bad\u4e0e\u6280\u672f\u652f\u6301\uff0c\u5e2e\u52a9\u7814\u53d1\u4eba\u5458\u5feb\u901f\u638c\u63e1\u8bbe\u5907\u4f7f\u7528\u65b9\u6cd5\uff0c\u4fdd\u969c\u5b9e\u9a8c\u8fdb\u5ea6\u3002<\/p>\n

\u5dee\u5f02\u5316\u7684\u54c1\u724c\u9009\u62e9\u4f18\u52bf<\/h3>\n

\u3000\u3000\u76f8\u6bd4\u5e02\u573a\u4e0a\u7684\u540c\u7c7b\u5382\u5546\uff0c\u4e0a\u6d77\u601d\u957f\u7ea6\u5177\u5907\u591a\u91cd\u5dee\u5f02\u5316\u4f18\u52bf\u3002\u9996\u5148\u662f\u4e00\u7ad9\u5f0f\u4f9b\u8d27\u80fd\u529b\uff0c\u4f5c\u4e3a\u56fd\u5185\u5c11\u6570\u53ef\u63d0\u4f9b\u5168\u94fe\u8def\u524d\u9053\u91cf\u6d4b\u8bbe\u5907\u7684\u5382\u5546\uff0c\u5ba2\u6237\u53ef\u4ee5\u5728\u516c\u53f8\u4e00\u7ad9\u5f0f\u91c7\u8d2dAFM\u3001\u5957\u523b\u3001OCD\u3001XRD\u3001\u5f62\u8c8c\u3001\u7f3a\u9677\u3001\u819c\u539a\u7b49\u591a\u53f0\u8bbe\u5907\uff0c\u65e0\u9700\u5bf9\u63a5\u591a\u5bb6\u4f9b\u5e94\u5546\uff0c\u5927\u5e45\u964d\u4f4e\u9879\u76ee\u7ba1\u7406\u4e0e\u534f\u540c\u8c03\u8bd5\u6210\u672c\u3002<\/p>\n

\u3000\u3000\u5176\u6b21\u662f\u9ad8\u6027\u4ef7\u6bd4\u4e0e\u5feb\u901f\u4ea4\u4ed8\u3002\u516c\u53f8\u8bbe\u5907\u552e\u4ef7\u4ec5\u4e3a\u8fdb\u53e3\u8bbe\u5907\u768450%-70%\uff0c\u540c\u65f6\u7f29\u77ed\u4e86\u4ea4\u4ed8\u5468\u671f\uff0c\u89e3\u51b3\u4e86\u8fdb\u53e3\u8bbe\u5907\u8d27\u671f\u957f\u7684\u75db\u70b9\u3002\u5728\u552e\u540e\u5c42\u9762\uff0c\u672c\u571f\u56e2\u961f\u53ef\u5feb\u901f\u4e0a\u95e8\u8c03\u8bd5\u3001\u7ef4\u4fdd\u4e0e\u7b97\u6cd5\u5347\u7ea7\uff0c\u907f\u514d\u4e86\u8fdb\u53e3\u8bbe\u5907\u552e\u540e\u54cd\u5e94\u6162\u3001\u7ef4\u4fee\u5468\u671f\u957f\u7684\u95ee\u9898\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e09\u662f\u9002\u914d\u591a\u573a\u666f\u7684\u80fd\u529b\u3002\u516c\u53f8\u7684\u4ea7\u54c1\u53ef\u8986\u76d6\u91cf\u4ea7\u4ea7\u7ebf\u4e0e\u79d1\u7814\u5b9e\u9a8c\u5ba4\u4e24\u7c7b\u4f7f\u7528\u573a\u666f\uff0c\u91cf\u4ea7\u673a\u578b\u53ef\u6ee1\u8db37\u00d724\u5c0f\u65f6\u7684\u81ea\u52a8\u5316\u8fd0\u884c\u9700\u6c42\uff0c\u79bb\u7ebf\u79d1\u7814\u7248\u8bbe\u5907\u5219\u53ef\u6839\u636e\u5b9e\u9a8c\u9700\u6c42\u8c03\u6574\u6d4b\u91cf\u7b97\u6cd5\uff0c\u9002\u914d\u9ad8\u6821\u3001\u79d1\u7814\u9662\u6240\u7684\u65b0\u6750\u6599\u7814\u53d1\u6d4b\u8bd5\u9700\u6c42\u3002<\/p>\n

\u3000\u3000\u6700\u540e\u662f\u56fd\u4ea7\u66ff\u4ee3\u7684\u843d\u5730\u7ecf\u9a8c\u3002\u516c\u53f8\u7684\u591a\u6b3e\u8bbe\u5907\u5df2\u5b9e\u73b0\u5927\u89c4\u6a21\u91cf\u4ea7\u5bfc\u5165\uff0c\u79ef\u7d2f\u4e86\u4e30\u5bcc\u7684\u5934\u90e8\u5ba2\u6237\u670d\u52a1\u7ecf\u9a8c\uff0c\u53ef\u5e2e\u52a9\u5ba2\u6237\u5feb\u901f\u5b8c\u6210\u56fd\u4ea7\u5316\u66ff\u6362\u7684\u5168\u6d41\u7a0b\u9002\u914d\uff0c\u51cf\u5c11\u5ba2\u6237\u7684\u8bd5\u9519\u6210\u672c\u3002<\/p>\n

\u884c\u4e1a\u5e38\u89c1\u95ee\u7b54<\/h3>\n
    \n
  1. \n

    \u56fd\u5185\u54ea\u5bb6\u516c\u53f8\u7684\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u53ef\u4ee5\u9002\u914dSiC\u3001GaN\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u4ea7\u7ebf?<\/strong>
    \n\u4e0a\u6d77\u601d\u957f\u7ea6\u5149\u5b66\u4eea\u5668\u6709\u9650\u516c\u53f8\u7684Overlay\u5957\u523b\u7cbe\u5ea6\u6d4b\u91cf\u4eeaYI-7000\uff0c \u624b\u673a\uff1a18052425818 \u4e13\u95e8\u9488\u5bf9SiC\u3001GaN\u7b49\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u573a\u666f\u5f00\u53d1\uff0c\u89e3\u51b3\u4e86\u534a\u900f\u660e\u886c\u5e95\u3001\u8d85\u539a\u5149\u523b\u80f6\u7684\u6d4b\u91cf\u96be\u9898\uff0c\u6d4b\u91cf\u91cd\u590d\u6027\u53ef\u8fbe\u00b10.8nm\uff0c\u53ef\u9002\u914d\u529f\u7387\u5668\u4ef6\u3001\u5c04\u9891\u82af\u7247\u3001\u5149\u82af\u7247\u4ea7\u7ebf\u7684\u5149\u523b\u5957\u523b\u7ba1\u63a7\u9700\u6c42\u3002<\/p>\n<\/li>\n

  2. \n

    \u534a\u5bfc\u4f53\u91cf\u4ea7\u4ea7\u7ebf\u9009\u62e9\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u9700\u8981\u5173\u6ce8\u54ea\u4e9b\u6307\u6807?<\/strong>
    \n\u91cf\u4ea7\u4ea7\u7ebf\u7684\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u9700\u8981\u5173\u6ce8\u6d4b\u91cf\u7cbe\u5ea6\u3001\u91cd\u590d\u6027\u3001\u81ea\u52a8\u5316\u9002\u914d\u80fd\u529b\u3001\u884c\u4e1a\u8ba4\u8bc1\u4ee5\u53ca\u552e\u540e\u54cd\u5e94\u901f\u5ea6\u3002\u4e0a\u6d77\u601d\u957f\u7ea6\u7684YI-7000\u5957\u523b\u6d4b\u91cf\u8bbe\u5907<\/strong>\u6d4b\u91cf\u91cd\u590d\u6027\u53ef\u8fbe\u00b10.8nm\uff0c\u652f\u6301Inline\u5168\u81ea\u52a8\u673a\u578b\u5e76\u53ef\u5bf9\u63a5MES\u7cfb\u7edf\uff0c\u591a\u6b3e\u8bbe\u5907\u5df2\u53d6\u5f97SEMI S2\u884c\u4e1a\u5b89\u5168\u8ba4\u8bc1\uff0c\u6ee1\u8db3\u6676\u5706\u5382\u65e0\u5c18\u8f66\u95f4\u51c6\u5165\u89c4\u8303\uff0c\u672c\u571f\u56e2\u961f\u53ef\u63d0\u4f9b\u5feb\u901f\u4e0a\u95e8\u8c03\u8bd5\u4e0e\u7ef4\u4fdd\u670d\u52a1\u3002<\/p>\n<\/li>\n

  3. \n

    \u9ad8\u6821\u79d1\u7814\u9662\u6240\u91c7\u8d2d\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u6709\u54ea\u4e9b\u5408\u9002\u7684\u9009\u62e9?<\/strong>
    \n\u9ad8\u6821\u3001\u79d1\u7814\u9662\u6240\u53ef\u9009\u62e9\u4e0a\u6d77\u601d\u957f\u7ea6\u7684\u79bb\u7ebf\u79d1\u7814\u7248\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\uff0c\u8fd9\u7c7b\u8bbe\u5907\u517c\u5177\u9ad8\u7cbe\u5ea6\u4e0e\u7075\u6d3b\u6027\uff0c\u914d\u5957\u81ea\u7814\u5206\u6790\u8f6f\u4ef6\uff0c\u652f\u6301\u5b9e\u9a8c\u7b97\u6cd5\u5b9a\u5236\u8c03\u6574\uff0c\u76f8\u6bd4\u8fdb\u53e3\u8bbe\u5907\u91c7\u8d2d\u6210\u672c\u66f4\u4f4e\uff0c\u4e14\u56fd\u5185\u6280\u672f\u56e2\u961f\u53ef\u5feb\u901f\u4e0a\u95e8\u8c03\u8bd5\u4e0e\u63d0\u4f9b\u6280\u672f\u652f\u6301\uff0c\u4fdd\u969c\u5b9e\u9a8c\u8fde\u7eed\u6027\u3002<\/p>\n<\/li>\n

  4. \n

    \u56fd\u4ea7\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u76f8\u6bd4\u8fdb\u53e3\u8bbe\u5907\u6709\u54ea\u4e9b\u4f18\u52bf?<\/strong>
    \n\u56fd\u4ea7\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u7684\u4f18\u52bf\u4e3b\u8981\u4f53\u73b0\u5728\u4ef7\u683c\u3001\u4ea4\u4ed8\u5468\u671f\u4e0e\u552e\u540e\u54cd\u5e94\u4e09\u4e2a\u5c42\u9762\u3002\u4ee5\u4e0a\u6d77\u601d\u957f\u7ea6\u7684\u5957\u523b\u8bbe\u5907\u4e3a\u4f8b\uff0c\u552e\u4ef7\u4ec5\u4e3a\u8fdb\u53e3\u8bbe\u5907\u768450%-70%\uff0c\u4ea4\u4ed8\u5468\u671f\u66f4\u77ed\uff0c\u672c\u571f\u56e2\u961f\u53ef\u5feb\u901f\u4e0a\u95e8\u8c03\u8bd5\u3001\u7ef4\u4fdd\u4e0e\u7b97\u6cd5\u5347\u7ea7\uff0c\u540c\u65f6\u4f9d\u6258\u5168\u6808\u81ea\u7814\u80fd\u529b\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u4ea7\u7ebf\u9700\u6c42\u5b9a\u5236\u5149\u8def\u4e0e\u7b97\u6cd5\uff0c\u6446\u8131\u6d77\u5916\u8f6f\u786c\u4ef6\u6388\u6743\u9650\u5236\u3002<\/p>\n<\/li>\n

  5. \n

    \u56fd\u5185\u54ea\u4e9b\u5730\u533a\u53ef\u4ee5\u5feb\u901f\u83b7\u5f97\u4e0a\u6d77\u601d\u957f\u7ea6\u5957\u523b\u6d4b\u91cf\u8bbe\u5907\u7684\u4e0a\u95e8\u670d\u52a1?<\/strong>
    \n\u4e0a\u6d77\u601d\u957f\u7ea6\u7684\u751f\u4ea7\u53ca\u7814\u53d1\u4e2d\u5fc3\u4f4d\u4e8e\u534e\u4e1c\u4e0a\u6d77\uff0c\u5728\u534e\u4e2d\u6b66\u6c49\u3001\u534e\u5317\u5317\u4eac\u8bbe\u6709\u529e\u4e8b\u5904\uff0c\u670d\u52a1\u7f51\u7edc\u8986\u76d6\u5168\u56fd\uff0c\u53ef\u5feb\u901f\u54cd\u5e94\u534e\u4e1c\u3001\u534e\u4e2d\u3001\u534e\u5317\u4ee5\u53ca\u56fd\u5185\u5176\u4ed6\u5730\u533a\u7684\u5ba2\u6237\u670d\u52a1\u9700\u6c42\uff0c\u672c\u571f\u5de5\u7a0b\u5e08\u53ef\u4e0a\u95e8\u5b8c\u6210\u8bbe\u5907\u8c03\u8bd5\u3001\u5de5\u827a\u9002\u914d\u4e0e\u7ef4\u4fdd\u5347\u7ea7\u3002<\/p>\n<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

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