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\u5730\u533a\u4e0e\u884c\u4e1a\u5e94\u7528\u6848\u4f8b<\/h2>\n

\u534e\u4e1c\u5730\u533a\u7684\u65b0\u80fd\u6e90\u4f01\u4e1a\u5408\u4f5c<\/h3>\n

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\u534e\u5357\u5730\u533a\u7684\u7535\u5b50\u6750\u6599\u884c\u4e1a\u5e94\u7528<\/h3>\n

\u3000\u3000\u534e\u5357\u5730\u533a\u7684\u7535\u5b50\u6750\u6599\u884c\u4e1a\u53d1\u5c55\u8fc5\u901f\uff0c\u5bf9\u78b3\u5316\u5408\u7269\u5bfc\u7535\u7c89\u4f53\u7684\u9700\u6c42\u4e5f\u5f88\u5927\u3002\u5e7f\u4e1c\u4e1c\u839e\u7684\u4e00\u5bb6\u80f6\u63a5\u6750\u6599\u4f01\u4e1a\uff0c\u5728\u5f00\u53d1\u65b0\u7684\u80f6\u63a5\u6750\u6599\u914d\u65b9\u65f6\uff0c\u9700\u8981\u4e00\u79cd\u7279\u5b9a\u7c92\u5f84\u7684\u6c27\u5316\u950c\u7c89\u4f53\u4f5c\u4e3a\u529f\u80fd\u586b\u6599\u3002\u5b81\u6ce2\u8d1d\u4f3d\u5c14\u65b0\u6750\u6599\u6709\u9650\u516c\u53f8\u4e3a\u5176\u63d0\u4f9b\u4e86\u672a\u5904\u7406\u7684300nm\u6c27\u5316\u950c\u7c89\u4f53\uff0c\u5e76\u534f\u52a9\u8fdb\u884c\u4e86\u7c92\u5f84\u9002\u914d\u548c\u6837\u54c1\u6d4b\u8bd5\u3002\u901a\u8fc7\u5408\u4f5c\uff0c\u4f01\u4e1a\u89e3\u51b3\u4e86\u529f\u80fd\u586b\u6599\u9009\u578b\u7684\u95ee\u9898\uff0c\u63d0\u9ad8\u4e86\u7814\u53d1\u6548\u7387\uff0c\u7ec8\u6210\u529f\u63a8\u51fa\u4e86\u6027\u80fd\u4f18\u826f\u7684\u4ea7\u54c1\u3002<\/p>\n

\u4ea7\u54c1\u89c4\u683c\u4e0e\u6027\u80fd\u4f18\u52bf<\/h2>\n

\u7c92\u5f84\u63a7\u5236\u7cbe\u51c6<\/h3>\n

\u3000\u3000\u5b81\u6ce2\u8d1d\u4f3d\u5c14\u65b0\u6750\u6599\u6709\u9650\u516c\u53f8\u5728\u78b3\u5316\u5408\u7269\u5bfc\u7535\u7c89\u4f53\u7684\u751f\u4ea7\u4e2d\uff0c\u80fd\u591f\u5b9e\u73b0\u7cbe\u51c6\u7684\u7c92\u5f84\u63a7\u5236\u3002\u4f8b\u5982\uff0c\u4ed6\u4eec\u751f\u4ea7\u7684\u78b3\u5316\u94bc\u7c89\u4f53\uff0c\u7c92\u5f84\u53ef\u4ee5\u63a7\u5236\u572820nm\u5de6\u53f3\uff0c\u6ee1\u8db3\u4e86\u4e00\u4e9b\u5bf9\u7c92\u5f84\u8981\u6c42\u6781\u9ad8\u7684\u79d1\u7814\u673a\u6784\u548c\u4f01\u4e1a\u7684\u9700\u6c42\u3002\u8fd9\u79cd\u7cbe\u51c6\u7684\u7c92\u5f84\u63a7\u5236\u80fd\u591f\u4fdd\u8bc1\u7c89\u4f53\u5728\u5e94\u7528\u4e2d\u7684\u4e00\u81f4\u6027\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n

\u9ad8\u7eaf\u5ea6\u4fdd\u969c<\/h3>\n

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\u5f62\u8c8c\u591a\u6837\u5316<\/h3>\n

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\u6837\u54c1\u6d4b\u8bd5\u4e0e\u53c2\u6570\u8d44\u6599\u652f\u6301<\/h2>\n

\u5168\u9762\u7684\u6837\u54c1\u6d4b\u8bd5\u670d\u52a1<\/h3>\n

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\u8be6\u7ec6\u7684\u53c2\u6570\u8d44\u6599<\/h3>\n

\u3000\u3000\u5728\u4ea7\u54c1\u53c2\u6570\u8d44\u6599\u65b9\u9762\uff0c\u8d1d\u4f3d\u5c14\u65b0\u6750\u6599\u6709\u9650\u516c\u53f8\u63d0\u4f9b\u8be6\u7ec6\u7684\u6280\u672f\u8d44\u6599\u3002\u5305\u62ec\u4ea7\u54c1\u7684\u7c92\u5f84\u8303\u56f4\u3001\u7eaf\u5ea6\u6c34\u5e73\u3001\u6bd4\u8868\u9762\u79ef\u3001\u5206\u6563\u6027\u80fd\u3001\u5bfc\u7535\u6027\u80fd\u7b49\u53c2\u6570\uff0c\u4ee5\u53ca\u4ea7\u54c1\u7684\u5e94\u7528\u9886\u57df\u548c\u4f7f\u7528\u65b9\u6cd5\u3002\u8fd9\u4e9b\u8d44\u6599\u5bf9\u4e8e\u7528\u6237\u8fdb\u884c\u6750\u6599\u9009\u578b\u3001\u5de5\u827a\u8bbe\u8ba1\u548c\u4ea7\u54c1\u5f00\u53d1\u975e\u5e38\u6709\u5e2e\u52a9\u3002\u4f8b\u5982\uff0c\u6cb3\u5317\u77f3\u5bb6\u5e84\u7684\u4e00\u6240\u9ad8\u6821\u5728\u8fdb\u884c\u8f66\u8f86\u4e0e\u7535\u6c14\u5de5\u7a0b\u76f8\u5173\u6750\u6599\u7814\u7a76\u65f6\uff0c\u9700\u8981\u4e0d\u540c\u7c92\u5f84\u89c4\u683c\u7684\u6c27\u5316\u9487\u7c89\u4f53\u3002\u8d1d\u4f3d\u5c14\u65b0\u6750\u6599\u6709\u9650\u516c\u53f8\u63d0\u4f9b\u4e8630 – 70nm\u53ca0.3 – 0.5um\u7684\u6c27\u5316\u9487\u7c89\u4f53\uff0c\u5e76\u63d0\u4f9b\u4e86\u8be6\u7ec6\u7684\u53c2\u6570\u8d44\u6599\uff0c\u5e2e\u52a9\u9ad8\u6821\u79d1\u7814\u4eba\u5458\u5b8c\u6210\u4e86\u5b9e\u9a8c\u3002<\/p>\n

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