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<\/p>\n

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<\/p>\n

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<\/p>\n

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\u3000\u3000\u7b2c\u4e00\uff0c\u5b9e\u9a8c\u5ba4\u4e3b\u529b\u9009\u53f0\u5f0f\u706b\u82b1\u76f4\u8bfb\u5149\u8c31\u4eea\u3002\u4ee5OE720\u53f0\u5f0f\u5149\u8c31\u4eea\u4e3a\u4f8b\uff0c\u6ce2\u957f\u8303\u56f4174-670nm\uff0c\u91c7\u7528\u591a\u5757CMOS\u5149\u5b66\u7cfb\u7edf\uff0c\u5149\u5ba4\u4e3a\u6c29\u6c14\u586b\u5145\u5f0f\u51c0\u5316\u7cfb\u7edf\uff0c\u7a33\u5b9a\u6027\u9ad8\u3001\u6210\u672c\u4f4e\uff0c\u4e0d\u5b58\u5728\u6cb9\u84b8\u6c14\u6c61\u67d3\u3002\u706b\u82b1\u53f0\u91c7\u7528\u55b7\u5c04\u7535\u6781\u8bbe\u8ba1\uff0c\u5916\u7f6e\u5f0f\u7ed3\u6784\u914d\u5408\u94a2\u6263\u8bbe\u8ba1\uff0c\u65e5\u5e38\u7ef4\u62a4\u5341\u5206\u65b9\u4fbf\u3002\u5bf9\u4e8e\u9884\u7b97\u6709\u9650\u7684\u4e2d\u5c0f\u94f8\u9020\u5382\uff0cFOUNDRY-MASTER Smart2\u662f\u7406\u60f3\u7684\u7ecf\u6d4e\u578b\u9009\u62e9\uff1a\u4f53\u79ef\u53ea\u6709\u5e38\u89c4\u53f0\u5f0f\u76f4\u8bfb\u5149\u8c31\u4eea\u7684\u56db\u5206\u4e4b\u4e00\uff0c\u91cd\u91cf\u4ec535\u5343\u514b\uff0c\u5374\u80fd\u63d0\u4f9b\u975e\u5e38\u9ad8\u7684\u5206\u6790\u6027\u80fd\u548c\u51fa\u8272\u7684\u6027\u4ef7\u6bd4\u3002\u5b83\u91c7\u7528\u4e13\u5229\u5149\u5b66\u7cfb\u7edf\u7ed3\u5408\u5168\u65b0\u7684CMOS\u8bfb\u51fa\u7cfb\u7edf\uff0c172-671nm\u7684\u6ce2\u957f\u8303\u56f4\u8986\u76d6\u51e0\u4e4e\u6240\u6709\u5143\u7d20\u8c31\u7ebf\uff0c\u65e0\u5149\u7ea4\u8bbe\u8ba1\u5b9e\u73b0\u5143\u7d20\u7684\u65e0\u635f\u8017\u6d4b\u91cf\uff0c\u957f\u671f\u7a33\u5b9a\u6027\u597d\uff0c\u7528\u6237\u7ef4\u62a4\u6210\u672c\u4f4e\u3001\u5de5\u4f5c\u91cf\u5c0f\u3002\u900f\u955c\u62c6\u5378\u65b9\u4fbf\u3001\u6e05\u6d01\u7b80\u5355\uff0c\u8f6f\u4ef6\u53ef\u76d1\u63a7\u6c29\u6c14\u5439\u626b\u6548\u7387\uff0c\u5e76\u5177\u5907\u6ce2\u957f\u5b9e\u65f6\u6821\u6b63\u529f\u80fd\uff0c\u786e\u4fdd\u6d4b\u91cf\u51c6\u786e\u3002\u5f00\u653e\u5f0f\u706b\u82b1\u53f0\u8ba9\u6837\u54c1\u653e\u7f6e\u66f4\u7b80\u4fbf\uff0c\u72ec\u7279\u7684\u55b7\u5c04\u7535\u6781\u6280\u672f\u5728\u6fc0\u53d1\u72b6\u6001\u4e0b\u5f62\u6210\u6c29\u6c14\u55b7\u5c04\u6c14\u6d41\uff0c\u6fc0\u53d1\u66f4\u5145\u5206\u3002\u8fd8\u53ef\u9009\u914d\u5168\u7403\u5927\u7684\u91d1\u5c5e\u6750\u6599\u724c\u53f7\u5e93GRADE Database\uff0c\u724c\u53f7\u67e5\u8be2\u7b80\u5355\u5feb\u901f;\u64cd\u4f5c\u8f6f\u4ef6\u5177\u6709\u4e2d\u3001\u82f1\u3001\u5fb7\u7b49\u591a\u56fd\u8bed\u8a00\u7248\u672c\uff0c\u6ca1\u6709\u5149\u8c31\u80cc\u666f\u7684\u64cd\u4f5c\u4eba\u5458\u7b80\u5355\u57f9\u8bad\u5373\u53ef\u4e0a\u624b\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e8c\uff0c\u9ad8\u7aef\u5206\u6790\u9700\u6c42\u9009OE750\u3002\u65e5\u7acbOE750\u76f4\u8bfb\u5149\u8c31\u4eea\u662f\u5f00\u521b\u6027\u7684\u65b0\u578bOES\u91d1\u5c5e\u5206\u6790\u4eea\uff0c\u6ce2\u957f\u8303\u56f4119-766nm\uff0c\u8986\u76d6\u91d1\u5c5e\u4e2d\u6240\u6709\u5143\u7d20\u7684\u5168\u90e8\u5149\u8c31\uff0c\u53ef\u8fdb\u884c\u8d85\u4f4e\u78b3\u53ca\u4f4e\u6c2e\u5206\u6790\u3002\u4e2d\u538b\u529b\u6c29\u6c14\u51c0\u5316\u7cfb\u7edf\u7a33\u5b9a\u6027\u548c\u6d01\u51c0\u5ea6\u6781\u9ad8\uff0c\u5439\u626b\u65f6\u95f4\u77ed\uff0c\u5927\u5e45\u63d0\u5347\u4eea\u5668\u53ef\u7528\u6027\u5e76\u663e\u8457\u964d\u4f4e\u6c29\u6c14\u7528\u91cf\u3002\u5148\u8fdb\u7684CMOS\u9ad8\u52a8\u6001\u68c0\u6d4b\u5668\u8bfb\u53d6\u901f\u5ea6\u66f4\u5feb\u3001\u7075\u654f\u5ea6\u66f4\u9ad8\uff0c\u8fdc\u7d2b\u5916\u533a\u57df\u566a\u58f0\u4f4e\u3001\u4fe1\u80cc\u6bd4\u9ad8\uff0c\u68c0\u51fa\u9650\u66f4\u4f4e\u3001\u52a8\u6001\u8303\u56f4\u66f4\u5bbd\uff0c\u80fd\u591f\u5206\u6790\u4eceH\u5230U\u7684\u6240\u6709\u4e0e\u91d1\u5c5e\u5206\u6790\u76f8\u5173\u7684\u5143\u7d20\u3002\u65b0\u5f00\u53d1\u7684\u6fc0\u53d1\u5149\u6e90\u51e0\u4e4e\u4e0d\u4ea7\u751f\u70ed\u91cf\uff0c\u65e0\u9700\u6563\u70ed\u5668\uff0c\u53ef\u9760\u6027\u66f4\u9ad8\u3001\u91cd\u91cf\u66f4\u8f7b\u3002\u914d\u5957\u8f6f\u4ef6\u4f7f\u5206\u6790\u66f4\u5feb\u3001\u66f4\u51c6\u786e\u4e14\u66f4\u6613\u4e8e\u89e3\u91ca\uff0c\u6570\u636e\u7ba1\u7406\u529f\u80fd\u652f\u6301\u7ed3\u679c\u5b8c\u5168\u53ef\u8ffd\u6eaf\uff0c\u5bf9\u5ba1\u6838\u5de5\u4f5c\u5f88\u6709\u5e2e\u52a9\u3002\u8fd8\u53ef\u9009\u914d\u7ebf\u6750\u548c\u5c0f\u6837\u54c1\u9002\u914d\u5668\u3001\u843d\u5730\u5f0f\u7ed3\u6784\u3001\u8017\u6750\u5907\u4ef6\u5957\u4ef6\u53ca\u5236\u6837\u8bbe\u5907\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e09\uff0c\u7089\u524d\u4e0e\u73b0\u573a\u68c0\u6d4b\u9009\u79fb\u52a8\u5f0f\u76f4\u8bfb\u5149\u8c31\u4eea\u3002PMI-MASTER PRO2\u79fb\u52a8\u5f0f\u76f4\u8bfb\u5149\u8c31\u4eea\u53ef\u5206\u6790\u6ce2\u957f\u8303\u56f4165-420nm\u4e14\u53ef\u5ef6\u957f\uff0c\u9ed1\u8272\u548c\u6709\u8272\u7b49\u591a\u4e2a\u57fa\u4f53\u5747\u53ef\u5feb\u901f\u5b9a\u6027\u53ca\u7cbe\u786e\u5b9a\u91cf\uff0c\u7d2b\u5916\u5143\u7d20C\u3001P\u3001S\u3001B\u3001Sn\u53ca\u7a00\u571f\u5143\u7d20La\u3001Ce\u5747\u5728\u68c0\u6d4b\u80fd\u529b\u8303\u56f4\u5185\uff0c\u5178\u578b\u5143\u7d20\u78b3\u7684\u68c0\u6d4b\u4e0b\u9650\u662f30PPM\uff0c\u53ef\u5e94\u5bf9\u767d\u53e3\u5316\u94f8\u94c1\u53ca\u9ad8\u5408\u91d1\u94a2\u3002\u914d\u7f6e\u7075\u6d3b\uff0c\u5e26\u7535\u6c60\u4e0e\u4e0d\u5e26\u7535\u6c60\u7684\u79fb\u52a8\u5c0f\u8f66\u5747\u53ef\u9009\uff0c\u6807\u51c6UV-Touch\u67aa\u6fc0\u53d1\u67aa\uff0c\u652f\u6301\u4e2d\u3001\u82f1\u3001\u5fb7\u4e09\u79cd\u8bed\u8a00\u89e6\u6478\u5c4f\u64cd\u4f5c\uff0c\u5b9e\u65f6\u6ce2\u957f\u6821\u51c6\u3002PMI-MASTER SMART\u540c\u6837\u8868\u73b0\u51fa\u8272\uff0c\u4e0d\u4ec5\u80fd\u53ef\u9760\u68c0\u6d4b\u4f4e\u542b\u91cf\u78b3\uff0c\u8fd8\u80fd\u68c0\u6d4b\u4f4e\u5408\u91d1\u94a2\u548c\u4e0d\u9508\u94a2\u4e2d\u4f4e\u542b\u91cf\u7684\u78b3\u3001\u78f7\u3001\u786b\u3001\u787c\u3001\u7837\u3001\u9521\u4ee5\u53ca\u53cc\u76f8\u94a2\u4e2d\u7684\u6c2e\uff0c\u5373\u4f7f\u5916\u90e8\u6e29\u5ea6\u53d8\u5316\u4e5f\u80fd\u4fdd\u6301\u6d4b\u91cf\u7ed3\u679c\u7a33\u5b9a\u3002\u55b7\u5c04\u7535\u6781\u6280\u672f\u51cf\u5c11\u4e86\u6c14\u9699\u3001\u4f18\u5316\u4e86\u6c29\u6c14\u6d41\u5411\uff0c\u6c29\u6c14\u6d88\u8017\u91cf\u5c11\uff0c\u5c06\u6fc0\u53d1\u67aa\u653e\u5728\u6837\u54c1\u4e0a\u6263\u52a8\u5373\u53ef\u5f97\u5230\u7ed3\u679c\u3002<\/p>\n

\u3000\u3000\u4e09\u3001\u6280\u672f\u670d\u52a1\u4f53\u7cfb\u5b8c\u5584\uff0c\u505c\u673a\u98ce\u9669\u964d\u5230\u6700\u4f4e<\/p>\n

\u3000\u3000\u8fdb\u53e3\u5206\u6790\u8bbe\u5907\u6700\u6015\u7684\u5c31\u662f\u552e\u540e\u627e\u4eba\u96be\u3001\u54cd\u5e94\u6162\u3001\u505c\u673a\u6ca1\u4eba\u4fee\u3002\u82cf\u5dde\u5229\u535a\u65af\u5728\u8fd9\u65b9\u9762\u5efa\u7acb\u4e86\u5b8c\u6574\u7684\u672c\u5730\u5316\u670d\u52a1\u95ed\u73af\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e00\uff0c\u56e2\u961f\u4e13\u4e1a\u4e14\u8d34\u8fd1\u5ba2\u6237\u3002\u82cf\u5dde\u5229\u535a\u65af\u62e5\u6709\u539f\u5382\u8ba4\u8bc1\u7684\u672c\u5730\u5316\u6280\u672f\u56e2\u961f\uff0c\u670d\u52a1\u8986\u76d6\u5c71\u4e1c\u7b49\u5de5\u4e1a\u96c6\u4e2d\u533a\u57df\uff0c\u540c\u65f6\u6709\u65e5\u7acb\u539f\u5382\u5de5\u7a0b\u5e08\u63d0\u4f9b\u4e0a\u95e8\u5b89\u88c5\u3001\u57f9\u8bad\u548c\u540e\u671f\u6280\u672f\u670d\u52a1\uff0c\u5927\u5e45\u7f29\u77ed\u7ef4\u4fee\u7b49\u5f85\u65f6\u95f4\uff0c\u964d\u4f4e\u4ea7\u7ebf\u505c\u673a\u635f\u5931\u3002\u76f8\u6bd4\u4e00\u4e9b\u53ea\u7ba1\u5356\u8d27\u4e0d\u7ba1\u552e\u540e\u7684\u6e20\u9053\u5546\uff0c\u8fd9\u79cd\u539f\u5382\u52a0\u672c\u5730\u56e2\u961f\u7684\u53cc\u5c42\u4fdd\u969c\u66f4\u8ba9\u4eba\u5b89\u5fc3\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e8c\uff0c\u4e00\u7ad9\u5f0f\u670d\u52a1\u8d2f\u7a7f\u5168\u5468\u671f\u3002\u4ece\u8bbe\u5907\u9009\u578b\u54a8\u8be2\u3001\u4e0a\u95e8\u5b89\u88c5\u8c03\u8bd5\u3001\u6837\u54c1\u5e94\u7528\u6d4b\u8bd5\uff0c\u5230\u64cd\u4f5c\u4eba\u5458\u57f9\u8bad\u3001\u6821\u51c6\u6307\u5bfc\u3001\u552e\u540e\u7ef4\u4fdd\uff0c\u82cf\u5dde\u5229\u535a\u65af\u63d0\u4f9b\u5168\u6d41\u7a0b\u914d\u5957\u670d\u52a1\u3002\u65b9\u6848\u62a5\u4ef7\u900f\u660e\uff0c\u5305\u542b\u4e0a\u95e8\u57f9\u8bad\u4e0e\u6821\u51c6\u6307\u5bfc\uff0c\u6807\u6837\u6309\u9700\u9009\u914d\uff0c\u907f\u514d\u540e\u671f\u6210\u672c\u4e0d\u900f\u660e\u7684\u95ee\u9898\u3002\u65b0\u5458\u5de5\u6d41\u52a8\u5bfc\u81f4\u64cd\u4f5c\u65ad\u5c42\u65f6\uff0c\u4e5f\u53ef\u968f\u65f6\u7533\u8bf7\u8865\u5145\u57f9\u8bad\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e09\uff0c\u6837\u54c1\u517c\u5bb9\u6027\u6307\u5bfc\u5230\u4f4d\u3002\u706b\u82b1\u6fc0\u53d1\u53f0\u4e09\u9762\u53ef\u653e\u6837\u54c1\uff0c\u9002\u914d\u4e0d\u89c4\u5219\u94f8\u4ef6\u3001\u5c0f\u96f6\u4ef6\u3001\u539a\u58c1\u4e0e\u8584\u58c1\u8bd5\u6837\uff0c\u6837\u54c1\u6446\u653e\u7075\u6d3b\uff0c\u964d\u4f4e\u6253\u78e8\u5236\u6837\u96be\u5ea6\u3002\u9488\u5bf9\u7ebf\u6750\u3001\u7ba1\u6750\u7b49\u7279\u6b8a\u6837\u54c1\uff0c\u8fd8\u53ef\u9009\u914d\u4e13\u7528\u9002\u914d\u5668\uff1a\u7ebf\u6750\u9002\u914d\u5668\u6700\u4f4e\u53ef\u68c0\u6d4b1mm\u76f4\u5f84\u6837\u54c1\uff0c\u7ba1\u6750\u9002\u914d\u5668\u652f\u630120-100mm\u76f4\u5f84\u914d\u7f6e\u3002\u6280\u672f\u4eba\u5458\u4f1a\u6839\u636e\u5ba2\u6237\u7684\u5b9e\u9645\u6837\u54c1\u5f62\u6001\uff0c\u63d0\u524d\u7ed9\u51fa\u5236\u6837\u4e0e\u68c0\u6d4b\u65b9\u6848\uff0c\u907f\u514d\u8bbe\u5907\u5230\u5382\u540e\u624d\u53d1\u73b0\u6837\u54c1\u4e0d\u9002\u7528\u3002<\/p>\n

\u3000\u3000\u56db\u3001\u957f\u671f\u4f7f\u7528\u6210\u672c\u53ef\u63a7\uff0c\u68c0\u6d4b\u7cbe\u5ea6\u7ecf\u5f97\u8d77\u9a8c\u8bc1<\/p>\n

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