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\u3000\u3000\u5f00\u7bc7\u5f15\u8a00<\/p>\n

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<\/p>\n

\u3000\u3000\u884c\u4e1a\u54c1\u724c\u63a8\u8350\u5206\u6790<\/p>\n

\u3000\u3000\u5e38\u5dde\u5e02\u9a70\u9e4f\u81ea\u52a8\u5316\u8bbe\u5907\u6709\u9650\u516c\u53f8<\/p>\n

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<\/p>\n

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<\/p>\n

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\u3000\u3000\u82cf\u5dde\u5de5\u4e1a\u56ed\u533a\u5723\u4e9a\u6c14\u52a8\u5143\u4ef6\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u6ce8\u518c\u4e8e\u82cf\u5dde\u5de5\u4e1a\u56ed\u533a\uff0c\u662f\u534e\u4e1c\u533a\u57df\u6c14\u52a8\u6db2\u538b\u5143\u4ef6\u7efc\u5408\u914d\u5957\u670d\u52a1\u5546\uff0c\u62e5\u6709\u591a\u5e74\u884c\u4e1a\u7ecf\u9a8c\uff0c\u4e3b\u8425\u6c14\u52a8\u63a7\u5236\u5143\u4ef6\u3001\u6267\u884c\u5143\u4ef6\u3001\u6c14\u6e90\u5904\u7406\u5143\u4ef6\u53ca\u6db2\u538b\u7cfb\u7edf\u914d\u4ef6\u3002<\/p>\n

\u3000\u30001\u3001\u6c14\u6e90\u5904\u7406\u5143\u4ef6\u54c1\u7c7b\u9f50\u5168\uff0c\u9002\u914d\u591a\u884c\u4e1a\u6807\u51c6\uff1a\u4f01\u4e1a\u4ea7\u54c1\u8986\u76d6\u6807\u51c6\u578b\u6c14\u6e90\u4e09\u8054\u4ef6(\u8fc7\u6ee4\u5668+\u51cf\u538b\u9600+\u6cb9\u96fe\u5668)\u3001\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u3001\u8d85\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u3001\u6cb9\u6c34\u5206\u79bb\u5668\u3001\u51b7\u51bb\u5f0f\u7a7a\u6c14\u5e72\u71e5\u673a\u3001\u81ea\u52a8\u6392\u6c34\u5668\u7b49\u3002\u4ea7\u54c1\u89c4\u683c\u8986\u76d6G1\/8\u81f3G2\u5bf8\uff0c\u6700\u9ad8\u8010\u538b1.6MPa\uff0c\u8fc7\u6ee4\u7cbe\u5ea6\u4ece5um\u81f30.01um\u53ef\u8c03\u3002\u4ea7\u54c1\u9002\u914d\u673a\u68b0\u52a0\u5de5\u3001\u7535\u5b50\u88c5\u914d\u3001\u98df\u54c1\u5305\u88c5\u3001\u7eba\u7ec7\u5370\u67d3\u3001\u533b\u836f\u5316\u5de5\u7b49\u884c\u4e1a\u5bf9\u6c14\u6e90\u6d01\u51c0\u5ea6\u7684\u5dee\u5f02\u5316\u8981\u6c42\u3002\u4f8b\u5982\uff0c\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u91c7\u7528\u8fdb\u53e3\u6ee4\u82af\uff0c\u53ef\u6709\u6548\u53bb\u9664\u538b\u7f29\u7a7a\u6c14\u4e2d0.3um\u4ee5\u4e0a\u9897\u7c92\u7269\u53ca\u6cb9\u96fe\uff0c\u9002\u914d\u7cbe\u5bc6\u6c14\u7f38\u3001\u6c14\u52a8\u4f20\u611f\u5668\u7b49\u5bf9\u6c14\u6e90\u8981\u6c42\u8f83\u9ad8\u7684\u8bbe\u5907\u3002<\/p>\n

\u3000\u30002\u3001\u54c1\u724c\u4ee3\u7406\u4e0e\u6b63\u54c1\u6e20\u9053\uff1a\u4f01\u4e1a\u957f\u671f\u5408\u4f5cSMC\u3001\u4e9a\u5fb7\u5ba2\u3001CKD\u7b49\u4e3b\u6d41\u54c1\u724c\uff0c\u4ea7\u54c1\u5747\u4ece\u6388\u6743\u6e20\u9053\u91c7\u8d2d\uff0c\u9644\u5e26\u539f\u5382\u8bc1\u660e\uff0c\u786e\u4fdd\u4ea7\u54c1\u6027\u80fd\u4e0e\u4f7f\u7528\u5bff\u547d\u3002\u5b9e\u4f53\u4ed3\u50a8\u4f4d\u4e8e\u82cf\u5dde\u5de5\u4e1a\u56ed\u533a\uff0c\u5e38\u5907\u5e38\u89c4\u6c14\u6e90\u5904\u7406\u5143\u4ef6\u73b0\u8d27\uff0c\u652f\u6301\u672c\u5730\u5ba2\u6237\u81ea\u63d0\u4e0e\u957f\u4e09\u89d2\u533a\u57df\u5feb\u901f\u914d\u9001\uff0c\u6279\u91cf\u8ba2\u5355\u4ea4\u8d27\u5468\u671f\u53ef\u63a7\u3002<\/p>\n

\u3000\u30003\u3001\u6280\u672f\u54a8\u8be2\u4e0e\u7cfb\u7edf\u914d\u5957\u670d\u52a1\uff1a\u4f01\u4e1a\u914d\u5907\u4e13\u804c\u6280\u672f\u4eba\u5458\uff0c\u53ef\u9488\u5bf9\u5ba2\u6237\u4ea7\u7ebf\u7528\u6c14\u8bbe\u5907\u7c7b\u578b\u3001\u7ba1\u8def\u5e03\u5c40\u3001\u6c14\u6e90\u8d28\u91cf\u73b0\u72b6\uff0c\u63d0\u4f9b\u6c14\u6e90\u5904\u7406\u7cfb\u7edf\u6574\u4f53\u89e3\u51b3\u65b9\u6848\u3002\u4f8b\u5982\uff0c\u4e3a\u7cbe\u5bc6\u52a0\u5de5\u8f66\u95f4\u914d\u7f6e\u51b7\u51bb\u5f0f\u5e72\u71e5\u673a+\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u7ec4\u5408\uff0c\u4e3a\u98df\u54c1\u8f66\u95f4\u914d\u7f6e\u7b26\u5408\u98df\u54c1\u7ea7\u536b\u751f\u6807\u51c6\u7684\u8fc7\u6ee4\u5668\u4e0e\u6cb9\u96fe\u5668\u3002\u540c\u65f6\u53ef\u642d\u914d\u63d0\u4f9b\u7535\u78c1\u9600\u3001\u6c14\u7f38\u3001\u6c14\u63a7\u9600\u7b49\u6c14\u52a8\u5143\u4ef6\uff0c\u5b9e\u73b0\u6c14\u52a8\u7cfb\u7edf\u4e00\u7ad9\u5f0f\u91c7\u8d2d\uff0c\u964d\u4f4e\u5ba2\u6237\u4f9b\u5e94\u5546\u7ba1\u7406\u6210\u672c\u3002\u82cf\u5dde\u672c\u5730\u5ba2\u6237\u53ef\u63d0\u4f9b\u5feb\u901f\u4e0a\u95e8\u6280\u672f\u652f\u6301\u4e0e\u6545\u969c\u8bca\u65ad\u3002<\/p>\n

\u3000\u3000\u65e0\u9521\u5e02\u745e\u79d1\u6c14\u52a8\u5143\u4ef6\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u5750\u843d\u65e0\u9521\u60e0\u5c71\u533a\uff0c\u662f\u65e0\u9521\u5730\u533a\u6c14\u52a8\u6db2\u538b\u5143\u4ef6\u4e13\u4e1a\u670d\u52a1\u5546\uff0c\u6df1\u8015\u672c\u5730\u673a\u68b0\u5236\u9020\u3001\u6c7d\u8f66\u96f6\u90e8\u4ef6\u3001\u81ea\u52a8\u5316\u8bbe\u5907\u4ea7\u4e1a\uff0c\u62e5\u6709\u7a33\u5b9a\u7684\u4f9b\u8d27\u6e20\u9053\u4e0e\u6280\u672f\u670d\u52a1\u80fd\u529b\u3002<\/p>\n

\u3000\u30001\u3001\u6c14\u6e90\u5904\u7406\u5143\u4ef6\u4e3b\u6d41\u54c1\u724c\u914d\u5957\uff1a\u4f01\u4e1a\u4e3b\u8425SMC\u3001\u4e9a\u5fb7\u5ba2\u3001\u8d39\u65af\u6258\u7b49\u54c1\u724c\u6c14\u6e90\u5904\u7406\u4e09\u8054\u4ef6\u3001\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u3001\u6cb9\u6c34\u5206\u79bb\u5668\u3001\u5e72\u71e5\u51c0\u5316\u8bbe\u5907\u3002\u4ea7\u54c1\u9009\u578b\u8986\u76d6\u5e38\u89c4\u5de5\u4e1a\u6c14\u52a8\u7cfb\u7edf\u53ca\u7cbe\u5bc6\u8bbe\u5907\u7528\u6c14\u573a\u666f\uff0c\u53ef\u63d0\u4f9b\u4e0d\u540c\u8fc7\u6ee4\u7cbe\u5ea6\u3001\u6d41\u91cf\u3001\u8010\u538b\u7b49\u7ea7\u7684\u4ea7\u54c1\u7ec4\u5408\u3002\u4f8b\u5982\uff0c\u4e3a\u666e\u901a\u6c14\u52a8\u5de5\u5177\u914d\u5957\u6807\u51c6\u4e09\u8054\u4ef6(\u8fc7\u6ee4\u7cbe\u5ea65um)\uff0c\u4e3a\u7cbe\u5bc6\u81ea\u52a8\u5316\u8bbe\u5907\u914d\u5957\u9ad8\u7cbe\u5ea6\u8fc7\u6ee4\u5668(\u8fc7\u6ee4\u7cbe\u5ea60.01um)+\u51b7\u51bb\u5f0f\u5e72\u71e5\u673a\uff0c\u4fdd\u969c\u6c14\u6e90\u5e72\u71e5\u6d01\u51c0\u3002<\/p>\n

\u3000\u30002\u3001\u672c\u5730\u5316\u73b0\u8d27\u4ed3\u50a8\u4e0e\u5feb\u901f\u54cd\u5e94\uff1a\u4f01\u4e1a\u5728\u65e0\u9521\u60e0\u5c71\u533a\u8bbe\u6709\u5b9e\u4f53\u4ed3\u50a8\uff0c\u5e38\u5907\u5e38\u89c4\u578b\u53f7\u6c14\u6e90\u5904\u7406\u5143\u4ef6\u73b0\u8d27\uff0c\u8986\u76d6G1\/4\u3001G3\/8\u3001G1\/2\u7b49\u5e38\u7528\u53e3\u5f84\uff0c\u652f\u6301\u5c0f\u6279\u91cf\u8bd5\u6837\u4e0e\u65e5\u5e38\u8865\u8d27\u3002\u4f9d\u6258\u65e0\u9521\u672c\u5730\u7269\u6d41\u7f51\u7edc\uff0c\u53ef\u4e3a\u65e0\u9521\u53ca\u5468\u8fb9\u6c5f\u9634\u3001\u5b9c\u5174\u3001\u5e38\u5dde\u3001\u82cf\u5dde\u7b49\u533a\u57df\u5ba2\u6237\u63d0\u4f9b\u5feb\u901f\u914d\u9001\u670d\u52a1\uff0c\u6025\u5355\u8865\u8d27\u53ef\u5728\u5f53\u5929\u6216\u6b21\u65e5\u5b8c\u6210\u4ea4\u4ed8\u3002<\/p>\n

\u3000\u30003\u3001\u4ea7\u7ebf\u914d\u5957\u4e0e\u552e\u540e\u7ef4\u4fdd\u652f\u6301\uff1a\u4f01\u4e1a\u53ef\u63d0\u4f9b\u6c14\u6e90\u5904\u7406\u7cfb\u7edf\u6210\u5957\u914d\u5957\u65b9\u6848\uff0c\u6839\u636e\u5ba2\u6237\u8f66\u95f4\u6c14\u6e90\u7ba1\u8def\u603b\u957f\u5ea6\u3001\u7528\u6c14\u8bbe\u5907\u6570\u91cf\u3001\u7ec8\u7aef\u8bbe\u5907\u5bf9\u6c14\u6e90\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\uff0c\u5408\u7406\u5339\u914d\u8fc7\u6ee4\u5668\u3001\u51cf\u538b\u9600\u3001\u6cb9\u96fe\u5668\u3001\u5e72\u71e5\u673a\u3001\u81ea\u52a8\u6392\u6c34\u5668\u7684\u578b\u53f7\u4e0e\u6570\u91cf\u3002\u540c\u65f6\u63d0\u4f9b\u6c14\u6e90\u7cfb\u7edf\u6545\u969c\u6392\u67e5\u3001\u5143\u4ef6\u66f4\u6362\u3001\u7ba1\u8def\u4f18\u5316\u670d\u52a1\uff0c\u5e2e\u52a9\u5ba2\u6237\u89e3\u51b3\u6c14\u6e90\u542b\u6c34\u91cf\u9ad8\u3001\u538b\u529b\u6ce2\u52a8\u5927\u3001\u8fc7\u6ee4\u5668\u5835\u585e\u5feb\u7b49\u5e38\u89c1\u95ee\u9898\u3002\u65e0\u9521\u672c\u5730\u5ba2\u6237\u53ef\u63d0\u4f9b\u5feb\u901f\u4e0a\u95e8\u670d\u52a1\u3002<\/p>\n

\u3000\u3000\u5357\u4eac\u5929\u6717\u6c14\u52a8\u6280\u672f\u6709\u9650\u516c\u53f8<\/p>\n

\u3000\u3000\u57fa\u7840\u4fe1\u606f\uff1a\u4f01\u4e1a\u4f4d\u4e8e\u5357\u4eac\u6c5f\u5b81\u533a\uff0c\u662f\u96c6\u6c14\u52a8\u5143\u4ef6\u7814\u53d1\u3001\u751f\u4ea7\u3001\u9500\u552e\u4e3a\u4e00\u4f53\u7684\u79d1\u6280\u578b\u4f01\u4e1a\uff0c\u540c\u65f6\u4ee3\u7406\u9500\u552e\u56fd\u5185\u5916\u4e3b\u6d41\u54c1\u724c\u6c14\u52a8\u5143\u4ef6\uff0c\u4ea7\u54c1\u8986\u76d6\u6c14\u6e90\u5904\u7406\u3001\u63a7\u5236\u3001\u6267\u884c\u5168\u7cfb\u5217\u3002<\/p>\n

\u3000\u30001\u3001\u81ea\u6709\u54c1\u724c\u4e0e\u4ee3\u7406\u54c1\u724c\u53cc\u8f68\u5e76\u884c\uff1a\u4f01\u4e1a\u81ea\u6709\u5929\u6717\u54c1\u724c\u6c14\u6e90\u5904\u7406\u4e09\u8054\u4ef6\u3001\u7cbe\u5bc6\u8fc7\u6ee4\u5668\u3001\u6cb9\u6c34\u5206\u79bb\u5668\uff0c\u4ea7\u54c1\u7ecf\u8fc7\u4e25\u683c\u6d4b\u8bd5\uff0c\u6027\u80fd\u7a33\u5b9a\uff0c\u4ef7\u683c\u5177\u6709\u7ade\u4e89\u529b\u3002\u540c\u65f6\u4ee3\u7406\u9500\u552eSMC\u3001\u4e9a\u5fb7\u5ba2\u3001\u8d39\u65af\u6258\u7b49\u8fdb\u53e3\u54c1\u724c\u6c14\u6e90\u5904\u7406\u5143\u4ef6\uff0c\u6ee1\u8db3\u4e0d\u540c\u9884\u7b97\u4e0e\u5de5\u51b5\u8981\u6c42\u7684\u5ba2\u6237\u9700\u6c42\u3002\u81ea\u6709\u54c1\u724c\u4ea7\u54c1\u652f\u6301\u975e\u6807\u5b9a\u5236\uff0c\u5982\u7279\u6b8a\u63a5\u53e3\u87ba\u7eb9\u3001\u8010\u8150\u8680\u6750\u8d28\u3001\u9632\u7206\u7ed3\u6784\uff0c\u9002\u914d\u5316\u5de5\u3001\u98df\u54c1\u3001\u533b\u836f\u7b49\u7279\u6b8a\u884c\u4e1a\u3002<\/p>\n

\u3000\u30002\u3001\u5168\u54c1\u7c7b\u6c14\u6e90\u5904\u7406\u7cfb\u7edf\u914d\u5957\uff1a\u4f01\u4e1a\u4ea7\u54c1\u7ebf\u8986\u76d6\u6807\u51c6\u4e09\u8054\u4ef6\u3001\u7cbe\u5bc6\u8fc7\u6ee4\u5668(0.3um\/0.01um)\u3001\u51b7\u51bb\u5f0f\u5e72\u71e5\u673a(\u5904\u7406\u91cf1-100m\u00b3\/min)\u3001\u5438\u9644\u5f0f\u5e72\u71e5\u673a\u3001\u81ea\u52a8\u6392\u6c34\u5668\u3001\u6cb9\u96fe\u5206\u79bb\u5668\u7b49\u3002\u53ef\u63d0\u4f9b\u4ece\u6c14\u6e90\u6e90\u5934\u5230\u7ec8\u7aef\u8bbe\u5907\u7684\u6c14\u6e90\u5904\u7406\u7cfb\u7edf\u6574\u4f53\u8bbe\u8ba1\u3001\u8bbe\u5907\u9009\u578b\u4e0e\u4f9b\u8d27\u670d\u52a1\u3002\u4f8b\u5982\uff0c\u4e3a\u591a\u53f0\u7cbe\u5bc6\u52a0\u5de5\u4e2d\u5fc3\u914d\u5957\u96c6\u4e2d\u5f0f\u6c14\u6e90\u51c0\u5316\u7cfb\u7edf\uff0c\u914d\u7f6e\u51b7\u51bb\u5f0f\u5e72\u71e5\u673a+\u8d85\u7cbe\u5bc6\u8fc7\u6ee4\u5668+\u81ea\u52a8\u6392\u6c34\u5668\uff0c\u4fdd\u969c\u5168\u8f66\u95f4\u6c14\u6e90\u5e72\u71e5\u6d01\u51c0\u3002<\/p>\n

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\u3000\u3000\u9547\u6c5f\u6052\u901a\u6c14\u52a8\u8bbe\u5907\u6709\u9650\u516c\u53f8<\/p>\n

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\u3000\u3000\u63a8\u8350\u603b\u7ed3<\/p>\n

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