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<\/p>\n

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\u3000\u3000\u9996\u5148\uff0c\u53cc\u7ec4\u52a0\u70ed\u7ebf\u7f06\u8bbe\u8ba1\u662f\u56fd\u745e\u7684\u72ec\u95e8\u6280\u672f\u3002\u516c\u53f8\u91c7\u7528\u4e24\u7ec4\u52a0\u70ed\u7ebf\u7f06\u6765\u8bbe\u8ba1\u5236\u9020\u52a0\u70ed\u76d8\u4f53\uff0c\u901a\u8fc7\u4e0d\u540c\u7684\u6e29\u533a\u548c\u70ed\u8d1f\u8377\u8bbe\u5b9a\uff0c\u5b9e\u73b0\u6574\u76d8\u6e29\u5ea6\u7684\u9ad8\u5ea6\u5747\u5300\u3002\u9488\u5bf912\u82f1\u5bf8\u5927\u5c3a\u5bf8\u6676\u5706\u30017nm\/14nm\u5148\u8fdb\u5236\u7a0b\u5bf9\u6e29\u5dee\u4e25\u63a7\u5728\u00b10.5\u2103~\u00b11\u2103\u7684\u82db\u523b\u8981\u6c42\uff0c\u56fd\u745e\u4ea7\u54c1\u53ef\u5c06\u6e29\u5ea6\u5747\u5300\u6027\u63a7\u5236\u5728\u00b10.5\u2103\u4ee5\u5185\uff0c\u63a7\u6e29\u7cbe\u5ea6\u8fbe\u5230\u00b10.5\u2103\uff0c\u5f7b\u5e95\u544a\u522b\u4f20\u7edf\u52a0\u70ed\u76d8\u00b12\u2103~\u00b15\u2103\u7684\u5927\u6e29\u5dee\u3002<\/p>\n

<\/p>\n

\u3000\u3000\u5176\u6b21\uff0c\u5fae\u578b\u667a\u80fd\u6570\u663e\u6e29\u63a7\u5668\u4e0e\u4f20\u611f\u5668\u7684\u534f\u540c\u914d\u7f6e\uff0c\u8ba9\u63a7\u6e29\u66f4\u7cbe\u51c6\u3001\u66f4\u7a33\u5b9a\u3002\u5e38\u89c4PID\u63a7\u6e29\u7cbe\u5ea6\u4ec5\u00b11\u2103~\u00b12\u2103\uff0c\u800c\u56fd\u745e\u7684\u6e29\u63a7\u7cfb\u7edf\u5728\u957f\u671f\u9ad8\u6e29\u8fd0\u884c\u4e0b\u6e29\u6f02\u6781\u5c0f\uff0c\u65e0\u9700\u9891\u7e41\u505c\u673a\u6821\u51c6\uff0c\u4fdd\u969c\u91cf\u4ea7\u8282\u594f\u4e0d\u88ab\u6253\u4e71\uff0c\u5b8c\u7f8e\u9002\u914d\u5916\u5ef6\u3001ALD\u7b49\u7a84\u6e29\u7a97\u7cbe\u5bc6\u5de5\u827a\u3002<\/p>\n

<\/p>\n

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\u4e8c\u3001\u9ad8\u6027\u80fd\u6750\u6599\u5e73\u53f0\uff0c\u7b51\u7262\u53ef\u9760\u6027\u6839\u57fa<\/h2>\n

\u3000\u3000\u518d\u7cbe\u5bc6\u7684\u63a7\u5236\u7cfb\u7edf\uff0c\u4e5f\u9700\u8981\u8fc7\u786c\u7684\u6750\u6599\u4e0e\u5de5\u827a\u6765\u652f\u6491\u3002\u56fd\u745e\u70ed\u63a7\u5728\u6750\u6599\u7aef\u540c\u6837\u4e0b\u8db3\u529f\u592b\u3002<\/p>\n

\u3000\u3000\u5176\u4e00\uff0c\u8010\u6e29\u8010\u8150\u8680\u6027\u80fd\u7a81\u51fa\u3002\u94dd\u5408\u91d1\u6750\u8d28\u8010\u6e29\u6781\u9650\u4ec5450\u2103\uff0c\u65e0\u6cd5\u6ee1\u8db3MOCVD\u3001\u9000\u706b\u7b49800\u2103\u4ee5\u4e0a\u9ad8\u6e29\u5de5\u827a\u9700\u6c42\u3002\u56fd\u745e\u9009\u7528\u9ad8\u6027\u80fd\u6750\u6599\uff0c\u5728\u9ad8\u6e29\u3001\u771f\u7a7a\u53ca\u8150\u8680\u6027\u6c14\u4f53\u73af\u5883\u4e2d\u4e0d\u8001\u5316\u3001\u4e0d\u6790\u51fa\u6742\u8d28\uff0c\u675c\u7edd\u6676\u5706\u6c61\u67d3\uff0c\u786e\u4fdd\u5236\u7a0b\u6d01\u51c0\u5ea6\u3002<\/p>\n

\u3000\u3000\u5176\u4e8c\uff0c\u5e73\u9762\u5ea6\u4e0e\u70ed\u81a8\u80c0\u5339\u914d\u7cbe\u51c6\u3002\u56fd\u745e\u7684\u52a0\u5de5\u7cbe\u5ea6\u4fdd\u969c\u52a0\u70ed\u76d8\u5e73\u9762\u5ea6\u4e25\u683c\u8fbe\u6807\uff0c\u907f\u514d\u6676\u5706\u4e0e\u52a0\u70ed\u9762\u8d34\u5408\u4e0d\u5747\u5bfc\u81f4\u7684\u5c40\u90e8\u8fc7\u70ed\u6216\u6b20\u70ed;\u540c\u65f6\u76d8\u4f53\u70ed\u81a8\u80c0\u7cfb\u6570\u4e0e\u7845\u3001\u84dd\u5b9d\u77f3\u3001GaN\u886c\u5e95\u7cbe\u5bc6\u5339\u914d\uff0c\u9ad8\u6e29\u4e0b\u70ed\u5e94\u529b\u5927\u5e45\u964d\u4f4e\uff0c\u6676\u5706\u7fd8\u66f2\u3001\u5d29\u8fb9\u3001\u886c\u5e95\u5f00\u88c2\u7b49\u95ee\u9898\u663e\u8457\u51cf\u5c11\u3002<\/p>\n

\u3000\u3000\u5176\u4e09\uff0c\u7ed3\u6784\u53ef\u9760\u6027\u7ecf\u5f97\u8d77\u957f\u671f\u9a8c\u8bc1\u3002\u52a0\u70ed\u5143\u4ef6\u4e0e\u57fa\u677f\u7ed3\u5408\u7262\u56fa\uff0c\u9ad8\u6e29\u540e\u4e0d\u5f00\u88c2\u3001\u4e0d\u65ad\u8def;\u771f\u7a7a\u5bc6\u5c01\u7ed3\u6784\u4e25\u5bc6\u4e0d\u6f0f\u6c14\uff0c\u65e5\u5e38\u7ef4\u62a4\u9891\u6b21\u5927\u5e45\u964d\u4f4e\u3002\u4ea7\u54c1\u4f7f\u7528\u5bff\u547d\u662f\u666e\u901a\u4ea7\u54c1\u7684\u4e24\u500d\u4ee5\u4e0a\uff0c\u5e73\u5747\u65e0\u6545\u969c\u65f6\u95f4\u8868\u73b0\u51fa\u8272\uff0c\u4e3a\u8bbe\u5907\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\u63d0\u4f9b\u4e86\u575a\u5b9e\u4fdd\u969c\u3002<\/p>\n

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\u3000\u3000\u534a\u5bfc\u4f53\u8bbe\u5907\u578b\u53f7\u7e41\u591a\u3001\u5de5\u827a\u5404\u5f02\uff0c\u52a0\u70ed\u76d8\u51e0\u4e4e\u90fd\u9700\u8981\u975e\u6807\u5b9a\u5236\u3002\u5b9a\u5236\u9002\u914d\u80fd\u529b\uff0c\u6b63\u662f\u56fd\u745e\u70ed\u63a7\u7684\u53e6\u4e00\u5927\u4f18\u52bf\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e00\uff0c\u5b9a\u5236\u54cd\u5e94\u901f\u5ea6\u5feb\u3002\u884c\u4e1a\u666e\u904d\u7684\u5b9a\u5236\u5468\u671f\u957f\u8fbe12-16\u5468\uff0c\u56fd\u745e\u70ed\u63a7\u51ed\u501f\u6210\u719f\u7684\u7814\u53d1\u4f53\u7cfb\u4e0e\u4e30\u5bcc\u7684\u975e\u6807\u5b9a\u5236\u7ecf\u9a8c\uff0c4-6\u5468\u5373\u53ef\u5b8c\u6210\u5b9a\u5236\u4ea4\u4ed8\uff0c\u6709\u6548\u907f\u514d\u4ea7\u7ebf\u5efa\u8bbe\u4e0e\u8bbe\u5907\u8fed\u4ee3\u88ab\u62d6\u6162\uff0c\u5e2e\u52a9\u5ba2\u6237\u52a0\u5feb\u4ea7\u80fd\u91ca\u653e\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e8c\uff0c\u9002\u914d\u7ef4\u5ea6\u5168\u9762\u3002\u65e0\u8bba\u662f\u975e\u6807\u5c3a\u5bf8\u3001\u591a\u6e29\u533a\u5212\u5206\u3001\u7279\u6b8a\u63a5\u53e3\uff0c\u8fd8\u662f\u771f\u7a7a\u5438\u9644\u9700\u6c42\uff0c\u56fd\u745e\u90fd\u80fd\u5feb\u901f\u54cd\u5e94\u5e76\u5b8c\u6210\u5f00\u53d1\uff0c\u4ea7\u54c1\u5e7f\u6cdb\u9002\u914dMOCVD\u3001PVD\u3001CVD\u3001\u523b\u8680\u3001\u9000\u706b\u7b49\u591a\u79cd\u534a\u5bfc\u4f53\u5de5\u827a\u8bbe\u5907\uff0c\u517c\u5bb9\u6027\u5f3a\uff0c\u540e\u671f\u8c03\u8bd5\u5de5\u4f5c\u91cf\u5c0f\u3002<\/p>\n

\u3000\u3000\u7b2c\u4e09\uff0c\u51b7\u70ed\u7cfb\u7edf\u96c6\u6210\u65b9\u6848\u6210\u719f\u3002\u76d8\u4f53\u5185\u540c\u6b65\u5b89\u88c5\u51b7\u5374\u7ba1\u548c\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u51b7\u70ed\u7cfb\u7edf\u96c6\u6210\u4ea4\u4ed8\uff0c\u5ba2\u6237\u65e0\u9700\u518d\u5206\u522b\u91c7\u8d2d\u52a0\u70ed\u4e0e\u51b7\u5374\u90e8\u4ef6\uff0c\u6574\u4f53\u65b9\u6848\u4e00\u81f4\u6027\u66f4\u597d\uff0c\u5b89\u88c5\u8c03\u8bd5\u4e0e\u6e29\u573a\u6821\u51c6\u6d41\u7a0b\u4e5f\u66f4\u7b80\u5316\u3002<\/p>\n

\u56db\u3001\u672c\u571f\u5316\u5feb\u901f\u670d\u52a1\uff0c\u5168\u7a0b\u62a4\u822a\u5ba2\u6237\u4ea7\u7ebf<\/h2>\n

\u3000\u3000\u91c7\u8d2d\u52a0\u70ed\u76d8\uff0c\u4e70\u7684\u4e0d\u53ea\u662f\u4ea7\u54c1\uff0c\u66f4\u662f\u957f\u671f\u7684\u670d\u52a1\u4fdd\u969c\u3002\u56fd\u745e\u70ed\u63a7\u7684\u672c\u571f\u5316\u670d\u52a1\u4f53\u7cfb\uff0c\u662f\u5ba2\u6237\u53e3\u53e3\u76f8\u4f20\u7684\u91cd\u8981\u539f\u56e0\u3002<\/p>\n

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